Polishing Material Testing Instrument-Joint Analysis- Testing- and Technology Cooperation Service Platform-Mtia - Research and development of universal embodied intelligence and embodied operating system

Zhongguancun Integrated Circuit Materials Industry Technology Innovation Alliance

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Ion chromatograph

Ion chromatograph

Inductively Coupled Plasma Emission Spectrometer

Inductively Coupled Plasma Emission Spectrometer

12-inch chemical-mechanical polishing machine台

12-inch chemical-mechanical polishing machine台

Step gauge

Atomic Force Microscope

Atomic Force Microscope

Oxide Film Thickness Gauge

Oxide Film Thickness Gauge

Metal film thickness gauge

Metal film thickness gauge

12-inch wafer defect scanner

12-inch wafer defect scanner

12-inch wafer defect inspection machine

12-inch wafer defect inspection machine

8-inch chemical-mechanical polishing machine台

8-inch chemical-mechanical polishing machine台

Thermogravimetric analyzer

Thermogravimetric analyzer

Fourier Transform Infrared Spectrometer

Fourier Transform Infrared Spectrometer

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Materials Alliance

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