Time-of-Flight Secondary Ion Mass Spectrometer

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Joint Analysis, Testing, and Technology Cooperation Service Platform

Testing instrument

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Product Description

Instrument and Equipment Information
Instrument Name	Time-of-Flight Secondary Ion Mass Spectrometer	Instrument model	TOF.SIMS 5
Instrument Name	Time-of-Flight Secondary Ion Mass Spectrometry	Place of origin and manufacturer	Germany/ION-TOF Company
Affiliated Unit	The Fifth Research Institute of Electronics, Ministry of Industry and Information Technology (China SaiBao Laboratory)	Acquisition time	2013
Placement location	No. 78, West Zhu Village Avenue, Zhu Village Subdistrict, Zengcheng District, Guangzhou City, Guangdong Province	Instrument Status	Normal
Device application range / Instrument measurement range (tolerance)	Application scope: 1. Information on the shallow surface of samples, including all elements—such as H—as well as compounds and organic substances; 2. Combined with surface scanning and delamination of samples, it can generate compositional maps of the sample surface, even in three dimensions; 3. Identification of dopants and impurities. Main parameters: Depth: 1–5 nm, Spatial resolution: 80 nm, Detection limit: ppm–ppb.
Whether it is regularly calibrated by a third-party agency	No	CNAS certification obtained.	Yes

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