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Coating and Developing Machine

Category:

Joint Analysis, Testing, and Technology Cooperation Service Platform

Process equipment

Photolithography Material Process Equipment

Product accessories:


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Product Description

Instrument and Equipment Information

Instrument Name

Coating and Developing Machine

Instrument model

ACT 8

Track

Place of origin and manufacturer

Japan/TEL

Affiliated Unit

Beijing Kehua Microelectronics Materials Co., Ltd.

Acquisition time

2012

Placement location

No. 4, Zhuyuan Road, Shunyi District, Beijing Municipality

Instrument Status

Normal

Device application range / Instrument measurement range (tolerance)

Photoresist coating/baking/developing;

Silicon wafer size: 8 inches.

Whether it is regularly calibrated by a third-party organization

No

CNAS certification obtained.

No