Lithography machine

Category:

Joint Analysis, Testing, and Technology Cooperation Service Platform

Process equipment

Photolithography Material Process Equipment

Product accessories:

Product Description

Instrument and Equipment Information
Instrument Name	Lithography machine	Instrument model	Step 5500/800
Instrument Name	Scanner	Place of Origin and Manufacturer	Netherlands/ ASML
Affiliated Unit	Beijing Kehua Microelectronics Materials Co., Ltd.	Acquisition time	2012
Placement location	No. 4, Zhuyuan Road, Shunyi District, Beijing Municipality	Instrument Status	Normal
Device application range / Instrument measurement range (tolerance)	Photoresist exposure: Exposure wavelength: 248 nm; Wafer size: 8 inches; Resolution: 110 nm.
Whether it is regularly calibrated by a third-party agency	No	CNAS certification obtained.	No

Materials Alliance

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