Key Dimension Scanning Electron Microscope

Category:

Joint Analysis, Testing, and Technology Cooperation Service Platform

Testing instrument

Photolithography Material Testing Instrument

Product accessories:

Product Description

Instrument and Equipment Information
Instrument Name	Key Dimension Scanning Electron Microscope	Instrument model	S 9220
Instrument Name	CD-SEM	Place of origin and manufacturer	Japan/Hitachi
Affiliated Unit	Beijing Kehua Microelectronics Materials Co., Ltd.	Acquisition time	2012
Placement location	No. 4, Zhuyuan Road, Shunyi District, Beijing Municipality	Instrument Status	Normal
Device application range / Instrument measurement range (tolerance)	Dimension measurement, measurement range: 0.1–2 µm.
Whether it is regularly calibrated by a third-party agency	No	CNAS certification obtained.	No

Materials Alliance

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