Liu Xianbing

Chairman and General Manager of Suzhou Kema Materials Technology Co., Ltd.

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Liu Xianbing is a nationally recognized (specially appointed expert), a leading talent at the provincial level in Jiangsu Province and the city level in Suzhou, and has served as Chairman and General Manager of Suzhou Kema Materials Technology Co., Ltd. since 2009. He earned his Ph.D. from the Department of Mechanical Engineering at the University of Connecticut in the United States. During his academic research, he held positions including Postdoctoral Researcher at the Advanced Manufacturing Research Institute of the University of Connecticut, Postdoctoral Researcher at the University of California, Davis, and Deputy Director of the IMS-M Laboratory in the Department of Mechanical and Aerospace Engineering at the same university. He has also been invited to serve as a special reviewer for numerous prestigious academic journals. In the corporate R&D management phase, he worked at LTD Ceramics Inc., a well-known advanced ceramics company based in Silicon Valley, California, USA, where he served as R&D Manager and concurrently held the position of General Manager of its sister company, LCL International, Inc. He has accumulated nearly 15 years of overseas experience in research, industrialization, and management within the field of advanced ceramics.

Speech Topic

Advanced Ceramic Materials and Components for Semiconductor Equipment

Speech Abstract

Advanced ceramic materials play a crucial role in semiconductor devices due to their high-temperature stability, chemical inertness, electrical properties, and mechanical performance. They are used in a variety of critical applications, including wafer handling and clamping, heating and adsorption, process gas delivery, and reaction chamber shielding. Their highly stable characteristics ensure reliable equipment operation even under extreme conditions, thereby enhancing both production efficiency and product quality. As the semiconductor industry continues to grow and technology advances, the demand for advanced ceramic materials and components is steadily increasing. Moreover, the forms of certain components have evolved—such as ceramic electrostatic chucks and ceramic heaters, which have gradually integrated multiple functions previously performed by separate components. To meet market demands, the industry is continuously exploring new material synthesis methods and fabrication techniques aimed at improving material performance. However, this field still faces several challenges, such as the complexity of manufacturing processes and cost pressures. Therefore, in the future, the industry will place greater emphasis on innovation in material design and optimization of manufacturing processes to address these challenges and drive the continued development of the semiconductor industry.

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