3D optical profiler

Category:

Joint Analysis, Testing, and Technology Cooperation Service Platform

Testing instrument

Silicon Material Testing Instrument

Optical Mask Testing Instrument

Encapsulation Material Testing Instrument

Product accessories:

Product Description

Instrument and Equipment Information
Instrument Name	Chinese: 3D optical profiler	Instrument model	VK-X250K
Instrument Name	3D Optical Profilometer	Place of origin and manufacturer	Japan/Kyoto
Affiliated Unit	The Fifth Research Institute of the Ministry of Industry and Information Technology (China SaiBao Laboratory)	Acquisition time	2018
Placement location	No. 78, West Zhu Village Avenue, Zhu Village Subdistrict, Zengcheng District, Guangzhou City, Guangdong Province	Instrument Status	Normal
Device application range / Instrument measurement range (tolerance)	Application scope: Primarily used for measuring the planar dimensions and volume area of products, flatness, average height differences in surface evenness, width, height, surface roughness, non-destructive measurement of film thickness, and measurement of the outermost surface of transparent films. Measurement parameters: Total magnification: up to 28,800x; Field of view: from 11 μm to 5,400 μm; Height measurement (display resolution: 0.5 nm; repeatability: 20x 40 nm, 50x 12 nm, 150x 12 nm; accuracy: 0.2 + L/100 μm or better).
Whether it is regularly calibrated by a third-party agency	Yes	CNAS certification obtained.	Yes

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