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W and Alloy Targets for 300mm Silicon Wafer Processes

Ningbo Jiangfeng Electronic Materials Co., Ltd.

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Target material

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Product Description

1. Purity ≥ 99.999%;

2. Welding pass rate ≥ 99%;

3. Machining accuracy: 0.1 mm;

4. Sputtering surface roughness ≤ 0.4 μm

5. Density ≥ 99%

6. Grain size ≤ 50 µm

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W and Alloy Targets for 200mm Silicon Wafer Processes