Inductively Coupled Plasma Mass Spectrometry

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Joint Analysis, Testing, and Technology Cooperation Service Platform

Testing instrument

Photolithography Material Testing Instrument

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Product Description

Instrument and Equipment Information
Instrument Name	Inductively Coupled Plasma Mass Spectrometry	Instrument model	7900
Instrument Name	ICPMS	Place of origin and manufacturer	United States / Agilent
Affiliated Unit	Fujian Hongguang Semiconductor Materials Co., Ltd.	Acquisition time	February 2019
Placement location	No. 773, Linqian Village, Jihu Town, Zhangzhou High-tech Zone, Fujian Province	Instrument Status	Normal
Device application range / Instrument measurement range (tolerance)	For the analysis of trace element content in various materials such as lithographic materials, electronic and electrical products, and process chemicals, the MDL is less than 0.1 ppb.
Whether it is regularly calibrated by a third-party agency	Yes	CNAS certification obtained.	No

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