Surface Defect Detection System
Category:
Polishing Material Testing Instrument
Product accessories:
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Product Description
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Instrument and Equipment Information |
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Instrument Name |
Surface Defect Detection System |
Instrument model |
SP2 |
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Surfscan SP2 |
Place of origin and manufacturer |
Singapore/KLA-Tencor (Singapore) Pte Ltd |
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Affiliated Unit |
Anji Microelectronics Technology (Shanghai) Co., Ltd. |
Acquisition time |
2017 |
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Placement location |
Building E, Floors 1-3, No. 258 Chenhui Road, Pudong New Area, Shanghai |
Instrument Status |
Normal |
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Device application range / Instrument measurement range (tolerance) |
The particle detection range for silicon wafers is 100 nm and above. |
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Whether it is regularly calibrated by a third-party agency |
No |
CNAS certification obtained. |
No |
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