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Bochun Materials Co., Ltd.

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Product Description

Product Category Secondary Category Product Name Image introduction Manufacturer Product Features
Specialty electronic gases Epitaxial diffusion Germane mixed gas Bochun Materials Co., Ltd.

　　Germane (GeH4) is an important source of high-purity elemental germanium and is primarily used in semiconductor processes, such as the SiGe epitaxial process and CMOS epitaxial growth.

　　Germane is a key material for China’s strategic emerging industries. Before 2009, China was almost entirely dependent on imports for high-purity germane. At that time, more than 90% of the global germane market was monopolized by European and American companies. Besides the high import prices, supply disruptions were frequently caused by tensions and changes in the international situation. In 2009, Bocun Materials broke the import monopoly on germane once and for all by establishing a world-leading germane (GeH4) production base in Quanzhou, Fujian Province.

Specialty electronic gases Epitaxial diffusion Boron hydride mixed gas Bochun Materials Co., Ltd.

Diborane (B2H6) is an important P-type doping deposition source and reducing gas used in semiconductor manufacturing processes, particularly in epitaxial film deposition.

In the production of diborane, Bocun Materials controls the entire process—through internal synthesis and purification—by precisely managing temperature, pressure, and flow rates, thereby minimizing the formation of byproducts and contaminants and comprehensively enhancing product quality. In particular, during product analysis, the company identifies species and quantifies their concentrations. At the same time, Bocun leverages its internal network to mitigate geographic risks.

Specialty electronic gases Extension Phosphine mixed gas Bochun Materials Co., Ltd.

Phosphine (PH3), as an important N-type dopant source in semiconductor device fabrication, is widely used in epitaxial deposition processes to impart the desired conductivity type and a specific resistivity to the material.

Bochun has achieved precise process control in both the blending process and concentration ranges for phosphine.

Specialty electronic gases Ion implantation SDS products (SDS PH3, SDS ASH3, SDS BF3) Bochun Materials Co., Ltd. By optimizing the form of the adsorption medium, SDS achieves a larger surface area for adsorption, enabling it to capture more gas and thus store and deliver greater quantities of gas. At the same time, this approach reduces on-site operational risks, extends emergency response time, and enhances equipment reliability.
Specialty electronic gases Ion implantation VAC mixed gas Bochun Materials Co., Ltd.

Non-highly toxic gas; utilizing dual-pressure regulation technology, the valve reduces the risk of gas leakage and ensures on-site safety. Stable and consistent negative-pressure gas output enhances equipment reliability.

Specialty electronic gases Etching Krypton gas Bochun Materials Co., Ltd. Krypton (Kr) etching gas. Bochun’s purification process can deliver krypton gas with a purity as high as 5N.
Specialty Electronic Gases Ion implantation Xenon gas Bochun Materials Co., Ltd. Xenon (Xe) gas is used as an ion implantation material. Xenon can be employed in the ion implantation process for manufacturing semiconductor devices, helping to enhance the material's electrical conductivity or resistivity and thereby improving the performance of semiconductors. Bochun’s purification technology can deliver xenon with a purity level exceeding 5N.

 

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