From October 22nd to 23rd, the6th Sino-German Workshop of Cooperation held was successfully held at Shanghai Institute of Microsystems. This workshop was co-organized by China and Germany and undertaken by Shanghai Microsystems, Chinese Academy of Sciences. More than 70 experts, scholars, and graduate students from the PGI-8 Institute, PGI-9 Institute, IEK-5 Institute, and Shanghai Institute of Microsystems, Chinese Academy of Sciences attended the workshop.