China Integrated Circuit Industry Electronic Specialty Gas Market Research Report (2025)

The “China Integrated Circuit Electronic Specialty Gas Market Research Report (2025)” is compiled by Shanghai Shengxintongtai Technology Development Co., Ltd., under the guidance of the Integrated Circuit Materials Industry Technology Innovation Alliance. Based on survey data from domestic wafer fabs and leading gas suppliers, the report provides an in-depth analysis of the current status and competitive landscape of the electronic specialty gas industry chain. The report covers market sizes for four core process segments: etching, ion implantation, thin-film deposition, and laser gases. It also analyzes the market size, market structure, and demand drivers for 10 sub-categories of specialty gases, including nitrogen trifluoride, hexafluorobutadiene, and hydrogen bromide. This report can serve as a valuable reference for semiconductor material suppliers, wafer manufacturers, and investment institutions when making decisions related to market entry, capacity planning, and technology roadmap development.

The “China Integrated Circuit Electronic Specialty Gas Market Research Report (2025)” is compiled by Shanghai Shengxintongtai Technology Development Co., Ltd., under the guidance of the Integrated Circuit Materials Industry Technology Innovation Alliance. Based on survey data from domestic wafer fabs and leading gas suppliers, the report provides an in-depth analysis of the current status and competitive landscape of the electronic specialty gas industry chain. The report covers market sizes for four core process segments—etching, ion implantation, thin-film deposition, and laser gases—and also analyzes the market size, market structure, and demand drivers for 10 sub-segment gas products, including nitrogen trifluoride, hexafluorobutadiene, and hydrogen bromide. This report can serve as a valuable reference for semiconductor material suppliers, wafer manufacturers, and investment institutions when making decisions related to market entry, capacity planning, and technology roadmap development.

Table of Contents
Chapter 1: Overview of the Current Status of Electronic Specialty Gases 1
1.1 Overview of Electronic Specialty Gases 1
1.2 Overview of Major Domestic Electronic Specialty Gas Companies 1
1.3 Overview of China’s Wafer Manufacturing 4
Chapter 2: Market Overview of Gases Used in Various Process Stages 8
2.1 Market Size of Etching Gases 8
2.2 Market Size of Ion Implantation Gases 10
2.3 Market Size of Thin-Film Deposition Gases 11
2.4 Laser Gas Market Size 12
Chapter 3: Market Overview of Special Gas Products in the Integrated Circuit Industry’s Sub-sectors    13
3.1 Market Demand for Nitrous Oxide 13
3.2 Market Demand for Silicon Tetrafluoride 13
3.3 Market Demand for Nitrogen Trifluoride 14
3.4 Fluoromethane Market Demand 15
3.5 Market Demand for Octafluorocyclobutane 16
3.6 Market Demand for Hexafluorobutadiene 16
3.7 Market Demand for Tungsten Hexafluoride 17
3.8 Market Demand for Hydrogen Bromide 18
3.9 Market Demand for Boron Trichloride 19
3.10 Market Demand for Carbonyl Sulfide 20
Chapter 4: Summary and Outlook for the Electronic Specialty Gas Industry    21
Appendix    23

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