Announcement of the First Batch of Group Standards for 2023 (Titanium Tetrachloride)

Announcement of Group Standards

To all relevant units:

According to the Provisions of the "Management Measures for Group Standards of the Zhongguancun Integrated Circuit Materials Industry Technology Innovation Alliance," Determination of Impurity Content in Titanium Tetrachloride for Integrated Circuits Inductively Coupled Plasma Mass Spectrometry The group standard has been developed in accordance with the prescribed procedures and has passed the approval process. The standard name and standard number are as follows:

Serial number

Standard Number

Standard Name

T/ICMTIA ESG0039-2024

Determination of Impurity Content in Titanium Tetrachloride for Integrated Circuits

Inductively Coupled Plasma Mass Spectrometry

This standard was issued on 2024 Year 4 Moon 30 Approved for release on the day, 2024 Year 6 Moon 1 Daily implementation Hereby announced.

2024 April of the year 30th of the month

Key words: