Announcement of the Establishment of the Group Standard “Determination of Impurity Content in Titanium Tetrachloride for Integrated Circuits—Inductively Coupled Plasma Mass Spectrometry”

To all relevant units:

After review by the Alliance Standards Committee, the application for the establishment of the group standard “Determination of Impurity Content in Titanium Tetrachloride for Integrated Circuits—Inductively Coupled Plasma Mass Spectrometry” has been approved and is hereby announced.

Serial number	Proposed Project Number	Standard Name	Leading unit	Revision and formulation
1	2023-2LX-ICMTIA	Determination of Impurity Content in Titanium Tetrachloride for Integrated Circuits—Inductively Coupled Plasma Mass Spectrometry	Luoyang Zhonggu Silicon High-Tech Co., Ltd.	Formulate

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