Announcement of the Second Batch of Group Standards for 2022

To all relevant units:

According to the Provisions of the "Administrative Measures for Group Standards of the Zhongguancun Integrated Circuit Materials Industry Technology Innovation Alliance," Quality Evaluation Metrics for Integrated Circuit Material Suppliers Wait 6 The group standard has been developed in accordance with the prescribed procedures and has passed the approval process. The standard name and standard number are as follows:

Serial number	Standard Number	Standard Name
1	T/ICMTIA BS0032-2023	Quality Evaluation Indicators for Integrated Circuit Material Suppliers
2	T/ICMTIA CM0033-2023	Alumina Ceramic Products for Integrated Circuits
3	T/ICMTIA ESG0034-2023	Mixed gas for integrated circuits: 20% fluorine/nitrogen
4	T/ICMTIA CM0035-2023	Sealing gaskets for semiconductor silicon material processing equipment
5	T/ICMTIA TG0036-2023	High-purity aluminum-scandium alloy target material for integrated circuits
6	T/ICMTIA CMP0037-2023	Chemical-Mechanical Polishing Pads for Integrated Circuits

The above standards apply to 2023 Year 3 Moon 13 Approved for release on the day, 2023 Year 4 Moon 30 Daily implementation Hereby announced.

Attachment: Group Standard Announcement No. 007

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