The 2022 Annual Meeting of the Alliance Standardization Technical Committee was held successfully!

From January 10 to 11, 2023, the Standardization Committee of the Zhongguancun Integrated Circuit Materials Industry Technology Innovation Alliance held its 2022 annual meeting in a grand manner. This conference was conducted online, and a total of 38 representatives from member units attended the meeting. The meeting was chaired by Director Liu Bing.

Secretary Wang Daxiang of the Standards Committee reported to all committee members on the completion of key tasks for 2022. In terms of the development of group standards, under the organization and coordination of the Secretariat, we have successfully completed the various stages—including project initiation, drafting, review, and publication—for a total of three batches of group standards: the first batch of 2021, the second batch of 2022, and the second sub-batch of 2022. A total of 22 group standards have been published, yielding abundant standardization achievements.

Meanwhile, the project “Construction and Research on a Standard System for Integrated Circuit Materials” has also achieved phased results. In February 2022, the project’s research activities were officially launched, and five research groups—each composed of representatives from various member units—were established to carry out specific tasks. In November, the Secretariat completed a research report of over 14,000 characters by organizing and analyzing the collected research data. The report provides an in-depth analysis of the current status and existing issues in China’s integrated circuit materials standard system and puts forward recommendations for further developing and improving the standard system.

In 2023, the development of alliance group standards will be closely integrated with the research findings of the system. We will precisely identify a list of critical and important standards that urgently need to be strengthened and develop corresponding progress plans to systematically implement the initiation and formulation of group standards.

After the report was presented, the attending committee members engaged in a lively and constructive discussion of the work report. The committee members unanimously agreed that the various tasks, centered around the Secretariat, had been carried out meticulously and solidly. In particular, the work on group standards and system research had progressed steadily, and the Standardization Committee’s achievements in 2022 were highly satisfactory. At the same time, the committee members expressed their endorsement of the Standardization Committee’s future directions and actively offered suggestions and shared their experiences. Finally, the conference approved the work report titled “Main Achievements in 2022 and Work Plan for 2023.”

On the afternoon of the 10th and on the 11th, the conference held plenary sessions and breakout sessions, respectively, to review six standards: “Quality Evaluation Indicators for Integrated Circuit Material Suppliers,” “Alumina Ceramic Products for Integrated Circuits,” “Mixed Gas 20% Fluorine/Nitrogen for Integrated Circuits,” “Sealing Gaskets for Semiconductor Silicon Material Processing Equipment,” “High-Purity Aluminum-Scandium Alloy Targets for Integrated Circuits,” and “Chemical Mechanical Polishing Pads for Integrated Circuits.”

During the review process of various standards, the drafting organizations provided a detailed, item-by-item presentation on the status of standard development and the specific content of each standard. After listening to these presentations and reviewing the relevant materials, the attending committee members and user representatives examined the submitted draft standards and put forward specific comments and suggestions for revision. At the conclusion of the meeting, all standards were put to a vote and unanimously approved. The conference resolved that each organization should revise its standards according to the review comments and then prepare the official submission documents, which will be submitted to the Secretariat for formal approval.

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