Notice on Soliciting Comments on the Second Batch of Group Standards for 2022

Notice on Soliciting Comments on Group Standards

Distinguished committee members and industry experts:

According to the drafting and revision plan of group standards by the “Integrated Circuit Materials Industry Technology Innovation Alliance Standards Committee,” the following group standards have completed the preparation of draft documents for public comment and are now open for public input.

Serial number	Project Approval Number	Standard Name
1	2020-6LX-ICMTIA	Alumina Ceramic Products for Integrated Circuits
2	2022-2LX-ICMTIA	Quality Evaluation Indicators for Integrated Circuit Material Suppliers
3	2022-5LX-ICMTIA	Sealing gaskets for semiconductor silicon material processing equipment
4	2022-9LX-ICMTIA	High-purity aluminum-scandium alloy target material for integrated circuits
5	2022-12LX-ICMTIA	Mixed gas for integrated circuits: 20% fluorine/nitrogen
6	2022-13LX-ICMTIA	Chemical-Mechanical Polishing Pads for Integrated Circuits

All relevant organizations and individuals are requested to submit their feedback to the Alliance Standards Committee by October 20, 2022. The format is flexible—as long as the content of your comments is clearly expressed. If no response is received by the deadline, it will be deemed that no comments have been submitted.

Standards Committee Contact: Wang Dafang

Phone: 13811525241

Email: dafang_wang@icmtia.com

Attachment: Second Batch of 2022 Group Standard Draft for Public Comments

Notice on Soliciting Comments on the Second Batch of Group Standards for 2022

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