Report on the Development Status of China’s Semiconductor Supporting Industry (2022 Edition)

This report is divided into two parts: Materials and Equipment. It analyzes the current industrial situation and development trends both domestically and internationally, market size, R&D and industrial development investments, patent status, workforce conditions, and existing challenges within the industry. The report was completed in June 2022.

As an essential link in the semiconductor and integrated circuit industry chain, the manufacturing sector of materials and specialized equipment for semiconductor fabrication plays a crucial, foundational role in industrial development. In early 2009, the Semiconductor Supporting Industries Branch of the China Semiconductor Industry Association began organizing its board member companies to conduct a survey on the current state of China’s semiconductor supporting industries. The aim was to gain a comprehensive understanding of key industry indicators, including overall industry size, product structure, technological levels, and the number of professionals employed in the sector. Based on this survey, the branch prepared a report on the development status of China’s semiconductor supporting industries, providing valuable reference material for relevant enterprises, government departments, and institutions. Since the establishment of the Integrated Circuit Materials Alliance in 2012, efforts to collect and analyze data on industry operations have been further strengthened. Over the past decade and more, this work has attracted increasing attention from an ever-growing number of companies. As the number of companies participating in the survey has risen year by year, the overall industry landscape has become increasingly clear.

We warmly welcome leaders, industry peers, and all friends who are concerned about the development of China’s semiconductor support industry to share your comments and suggestions with us. Your every perspective will greatly encourage and improve our work!

Secretariat of the Semiconductor Supporting Industries Branch, China Semiconductor Industry Association
Secretariat of the Integrated Circuit Materials Industry Technology Innovation Alliance
June 2022
 

Table of Contents

Part One: Semiconductor Materials 6
1. Current Status and Development Trends of the Global Semiconductor Materials Industry 6
1.1 Overall Situation 6
1.2 Wafer Manufacturing Materials 7
1.3 Encapsulation Materials 7
2 Development Trends in China’s Semiconductor Materials Market Demand 10
2.1 Overall Situation 10
2.2 Wafer Manufacturing Materials 11
2.3 Encapsulation Materials 12
3 Overview of China’s Semiconductor Materials Industry 13
3.1 Overall Situation 13
3.1.1 Sales Revenue 13
3.1.2 R&D Investment 17
3.1.3 Application/Authorization of Invention Patent 18
3.1.4 Personnel 21
3.2 Silicon Materials Industry 23
3.3 Photolithography Materials Industry 27
3.4 Process Chemicals Industry 30
3.5 Electronic Gas Industry 32
3.6 CMP Polishing Materials Industry 34
3.7 Sputtering Target Industry 36
3.8 Packaging Materials Industry 38
4 Issues and Reflections on China’s Semiconductor Materials Industry 41
4.1 Rising prices of energy and raw materials increase cost pressures on material production. 41
4.2 The enhancement of industrial technological levels still requires attention from the national government, enterprises, and all sectors of society. 41
4.3 The issue of homogeneous competition among enterprises is becoming increasingly serious. 42
4.4 The supply chain is incomplete, and there are bottlenecks in industrial development. 42
4.5 High-end talent is severely scarce, hindering the innovative development of the industry. 43
Part II: Semiconductor-Specific Equipment 44
1. Overview of the Global Semiconductor Special Equipment Development and Analysis of Industry Market Demand 46
1.1 Global Semiconductor Equipment Development in 2021 46
1.1.1 Overall Situation of the Global Semiconductor Equipment Market in 2021 46
1.1.2 Global Semiconductor Equipment Regional Market in 2021 47
1.1.3 2021 Global Semiconductor Equipment Major Companies Overview 49
1.2 Analysis of the Global Semiconductor Equipment Market Demand in 2022 53
2 Development Status of China’s Semiconductor Special Equipment Industry 54
2.1 Industry Scale 54
2.2 Industrial Structure 55
2.3 Technical Level 58
2.4 Technology Investment 62
2.5 Intellectual Property 63
2.6 Industry Talent 64
3. Issues and Reflections on China’s Semiconductor Equipment Industry 66
3.1 Focus on collaborative development to achieve technological iteration 66
3.2 Supply chain security issues are becoming increasingly prominent, and verification of critical components needs to be accelerated. 67
3.3 Strengthen talent recruitment and improve talent support policies 67
3.4 Establish a Collaborative Innovation Ecosystem for Process and Equipment 67

List of Figures
Figure 1: Global Trends in the Market for Wafer Manufacturing Materials/Packaging Materials, 2015–2023 6
Figure 2: Development Trends of the Global Semiconductor Materials Market by Region, 2015–2023 7
Figure 3: Global Market Size and Forecast for Wafer Manufacturing Materials, 2015–2023 8
Figure 4: Global Packaging Materials Market Size and Forecast, 2015–2023 9
Figure 5: Development of Semiconductor Industry Sales in China, 2010–2021 10
Figure 6: Development Trend of the Market Size for Wafer Manufacturing Materials/Packaging Materials in China, 2015-2022 11
Figure 8: Market Structure of China’s Wafer Manufacturing Materials in 2021 12
Figure 8: Market Structure of China’s Packaging Materials in 2021 13
Figure 9: Development Trend of Sales Revenue for Semiconductor Materials Companies, 2010–2022 14
Figure 10: Composition of Sales Revenue for Semiconductor Material Companies in 2021 14
Figure 11: Composition of Product Sales Revenue from Semiconductor Manufacturing/ Packaging by Enterprises in 2021 16
Figure 12: Development Trend of Sales Revenue for Sample Enterprises in the First Quarter, 2019–2022 17
Figure 13: R&D Investment by Specialized Field in Semiconductor Materials Enterprises, 2010–2021 18
Figure 14: Patent Application and Grant Status of Invention Patents by Semiconductor Material Enterprises, 2010–2021 19
Figure 15: Patent Application Status of Semiconductor Material Companies by Specialization from 2010 to 2021 – 20
Figure 16: Patent Grant Status of Semiconductor Material Companies by Specialization from 2010 to 2021 21
Figure 17: Total Number of Employees in Various Professional Fields of Semiconductor Material Enterprises in 2021 22
Figure 18: Staff Composition of Semiconductor Material Enterprises in 2021 (by Job Nature) 22
Figure 19: Staff Composition of Semiconductor Material Enterprises in 2021 (by Education Level) 23
Figure 20: Current Status and Development Forecast of the Global Silicon Wafer Market by Diameter 24
Figure 21: Sales Revenue of Silicon Material Enterprises from 2010 to 2022 25
Figure 22: Global Photoresist Market Structure in 2021 28
Figure 23: Growth in Sales Revenue of Photoresist Companies from 2010 to 2022 29
Figure 24: Growth in Sales Revenue of Process Chemical Companies from 2010 to 2022 31
Figure 25: Growth in Sales Revenue of Electronic Gas Companies from 2010 to 2022 33
Figure 26: Growth in Sales Revenue of Polishing Materials Enterprises from 2010 to 2022 35
Figure 27: Growth in Sales Revenue of Sputtering Target Companies from 2010 to 2022 38
Figure 28: Growth in Sales Revenue of Packaging Materials Companies from 2010 to 2022 39
Figure 30: Global Semiconductor Equipment Market, 2010–2021 46
Figure 31: China Semiconductor Equipment Market (SEMI), 2015–2021 48
Figure 32: Global Semiconductor Equipment Market Demand Forecast, 2020–2030 54
Figure 33: Detailed Sales of Domestic Semiconductor Equipment, 2015–2021 55
Figure 34: Composition of Semiconductor Equipment Sales Revenue for Representative Companies in 2021 56
Figure 35: Projected Composition of Semiconductor Equipment Sales Revenue for Representative Companies in 2022 57
Figure 36: R&D Investment in China’s Semiconductor Equipment Industry 62
Figure 37: Patent Applications/Authorizations in China’s Semiconductor Equipment Industry 64
Figure 38: Staff Composition of 20 Semiconductor Special Equipment Enterprises in 2021 65
Table 1: Global Market Size and Forecast for Wafer Manufacturing Materials, 2015–2023 8
Table 2: Current Status and Forecast of the Global Semiconductor Packaging Materials Market, 2015–2023 9
Table 3: China’s Market Size for Wafer Manufacturing Materials, 2015–2022 11
Table 4: Market Size of Semiconductor Packaging Materials in China, 2015–2022 12
Table 5: Sales Revenue of Enterprises in Various Specialized Fields of Semiconductor Materials from 2010 to 2022 15
Table 6: Sales Revenue from Products Used by Enterprises for Semiconductor Manufacturing/Packaging, 2010–2022 15
Table 7: R&D Investment by Specialized Field in Semiconductor Materials Enterprises, 2010–2021 17
Table 8: Patent Application Status of Semiconductor Materials Enterprises by Specialized Field, 2010–2021 19
Table 9: Patent Grant Status of Semiconductor Materials Enterprises by Specialized Field, 2010–2021 20
Table 10: Comprehensive Statistical Data on 19 Representative Semiconductor Equipment Enterprises in China 45
Table 11: Global Semiconductor Industry Equipment Investment Expenditures 47
Table 12: Global Semiconductor Equipment Capital Expenditure by Major Countries/Regions in 2021 49
Table 13: 2021 Global Revenue of Major Semiconductor Equipment Suppliers 49