Notice on Soliciting Comments on the Second Batch of Proposed Group Standard Projects for 2022 and the Drafting Units

To all relevant units of the Alliance:

After formal review by the Secretariat of the Alliance Standards Committee, the following 9... The proposed group standard project is now open for public comment.

Serial number	Proposed Project Approval Number	Standard Name	Leading unit	Revision and formulation
1	2022-5LX-ICMTIA	For semiconductor silicon material processing equipment Sealing gasket	Jiangsu Xinhua Semiconductor Materials Technology Co., Ltd.	Formulate
2	2022-6LX-ICMTIA	High-purity cobalt target material for integrated circuits	Youyan Yijin New Materials Co., Ltd.	Formulate
3	2022-7LX-ICMTIA	High-purity nickel-platinum alloy targets for integrated circuits
4	2022-8LX-ICMTIA	High-purity copper and copper alloy targets for integrated circuits
5	2022-9LX-ICMTIA	High-purity aluminum-scandium alloy target material for integrated circuits
6	2022-10LX-ICMTIA	Tungsten targets for integrated circuits
7	2022-11LX-ICMTIA	High-purity tantalum targets for integrated circuits
8	2022-12LX-ICMTIA	Mixed gas for integrated circuits: 20% fluorine/nitrogen	Fujian Del Technology Co., Ltd.	Formulate
9	2022-13LX-ICMTIA	Chemical-Mechanical Polishing Pads for Integrated Circuits	Integrated Circuit Materials Alliance, Ningbo Yingweitaike New Materials Co., Ltd., Hubei Dinghui Microelectronics Materials Co., Ltd.	Formulate

The documents, including the “draft standard and preparation instructions” for the above-mentioned proposed standard projects, are provided in Attachment 1. If you have any objections or other suggestions, please provide feedback to the Secretariat by July 15.

Enterprises, institutions, research institutes, testing organizations, higher education institutions, and other entities intending to participate in the development of the above-mentioned standards as drafting units are requested to complete the “Application Form for Participation in the Development and Revision of Group Standards” (Attachment 2). ), and please provide feedback to the Secretariat by July 15.

Secretariat Contact: Wang Dafang Email: dafang_wang@icmtia.com

Attachment 1 Draft Standard and Preparation Instructions

Appendix 2 Application Form for Participation in the Development and Revision of Group Standards

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