The second batch of group standard review meetings for 2021 was held.

The Standards Committee of the Zhongguancun Integrated Circuit Materials Alliance on 2022 Year 3 Moon 30 ~ 31 day Hold a meeting 2021 The second batch of the year, totaling 13 Item Online review meeting for the group standard.

This review meeting is divided into 3 categories based on professional type. The sub-venues are being held simultaneously. The Electronic Gases Specialist Group is composed of... Jiangsu Nanda Optoelectronics serves as the leading unit and is responsible for the “Electronic Special Gases” project. Ethylene, Electronic Specialty Gases Difluoromethane, Electronic Specialty Gases Germane, Ethylsilane for Integrated Circuits, General Principles for Sampling High-Purity Gaseous Products, and Preparation of Mixed Gases for the Electronics Industry Weighing Method, 10% Methane / Argon gas mixture》、《 1.2% Helium / Nitrogen Mixed Gas, Chlorine for Integrated Circuits, Hydrogen Chloride for Integrated Circuits, etc. 9 Review the standard.

The Silicon Materials Specialist Group, led by Youyan Semiconductor, focuses on "Advanced Memory Applications." 300mm The standards “Silicon Single-Crystal Polished Wafers” and “Electronic-Grade Polycrystalline Silicon for Integrated Circuits” are under review.

The Packaging Materials Specialist Group, led by Yantai Debang, is reviewing the standard "Tin-Silver Plating Solution for Integrated Circuits."

Representatives from the leading organizations of various group standards reported to the attending committee members on the standard development process and the content of the standards. Based on their careful review of the submitted draft standards, preparation notes, and summary tables of feedback received, the attending committee members raised questions regarding specific technical issues, data sources, and wording used in the standards. The drafting organizations provided responses, explanations, and clarifications, and engaged in thorough discussions on key issues.

Finally, each group of committee members voted on the various standards and obtained a number of votes no fewer than the number of reviewers. 3/4 The “agreement” votes or “agree upon completion of revisions” votes were all approved in the standard review. Finally, the meeting requested that the leading organizations responsible for each group standard that has passed the review promptly prepare and submit the draft for approval after making revisions according to the review comments.

Key words: