Announcement of the Second Batch of Group Standards for 2021

Announcement of Group Standard

To all relevant units:

According to the Provisions of the "Management Measures for Group Standards of the Zhongguancun Integrated Circuit Materials Industry Technology Innovation Alliance," the "Gases for Integrated Circuits" Ethylsilane and others 13 The group standard has been developed in accordance with the prescribed procedures and has passed the approval process. The standard name and standard number are as follows:

Serial number	Standard Number	Standard Name
1	T/ICMTIA ESG0016—2022	Gases for integrated circuits Disilane
2	T/ICMTIA PC0017—2022	Tin-silver plating solution for integrated circuits
3	T/ICMTIA ESG0018—2022	Gases for integrated circuits Ethylene
4	T/ICMTIA ESG0019—2022	Gases for integrated circuits Difluoromethane
5	T/ICMTIA ESG0020—2022	Gases for integrated circuits Germane
6	T/ICMTIA ESG0021—2022	General Guidelines for Sampling High-Purity Gas Products
7	T/ICMTIA ESG0022—2022	Preparation of Mixed Gases for the Electronics Industry Weighing method
8	T/ICMTIA ESG0023—2022	Mixed gases for integrated circuits 10% Methane / Argon
9	T/ICMTIA ESG0024—2022	Mixed gases for integrated circuits 1.2% Helium / Nitrogen
10	T/ICMTIA ESG0025—2022	Gases for integrated circuits Chlorine
11	T/ICMTIA ESG0026—2022	Gases for integrated circuits Hydrogen chloride
12	T/ICMTIA SM0027—2022	For advanced memory 300mm Silicon single-crystal polished wafers
13	T/ICMTIA SM0028—2022	Electronic-grade polycrystalline silicon for integrated circuits

The above standards apply to 2022 Year 5 Moon 10 Approved for release on the day, 2022 Year 5 Moon 31 Daily implementation Hereby announced.

Attachment: Material Alliance [2022] No. 025

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