Announcement of the T/ICMTIA 3-2020 Group Standard for the Alliance T/ICMTIA 3-2020

To all relevant units:

　　In accordance with the "Regulations on the Administration of Group Standards" and the "Procedures for Developing Standards of the Integrated Circuit Materials Industry Technology Innovation Alliance," and following review and approval by the Alliance Standards Committee, the group standard T/ICMTIA 3-2020 "Hexachlorosilane for Integrated Circuits" is hereby approved and released.

　　This standard was issued on February 24, 2020, and will take effect on April 24, 2020. This is hereby announced.

Integrated Circuit Materials Industry Technology Innovation Alliance
February 24, 2020

T/ICMTIA 3-2020 Catalog of the Group Standard “Hexachlorosilane for Integrated Circuits”

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