08
2021
-
11
Best Contribution Award
1. Li Shaoping
Li Shaoping, Chairman of Hubei Xingfu Electronic Materials Co., Ltd. and Vice Chairman of the Strategic Alliance for Technological Innovation in the Integrated Circuit Materials Industry, has spearheaded the R&D of numerous process chemicals and successfully developed a series of high-purity products, including phosphoric acid, sulfuric acid, hydrofluoric acid, and formulated functional chemicals. These products are widely used in the manufacturing of 8-inch and 12-inch integrated circuits. He also led the establishment of the Yichang Specialty Zone for Electronic Chemicals and has made outstanding contributions to the cluster-based and large-scale development of process chemicals as well as to the enhancement of the supply chain!
2. Li Shaobo
Li Shaobo, Vice Chairman of China Shipbuilding Industry Corporation (Handan) Pairy Special Gases Co., Ltd., leads the company’s team specializing in electronic specialty gases. Together, they have overcome key technical challenges—including the synthesis, purification, impurity detection, and efficient blending of high-purity fluorine-containing electronic gases—and achieved large-scale production. Performance indicators for high-purity electronic gases such as nitrogen trifluoride and tungsten hexafluoride have reached or surpassed those of comparable international products, laying a solid foundation for the future leapfrog development of the high-purity specialty gas industry.
3. Pan Jie
Pan Jie, General Manager of Ningbo Jiangfeng Electronic Materials Co., Ltd., has been engaged for many years in the R&D and industrialization of sputtering targets and is one of the renowned Chinese-American technical experts in this field. He has led or participated in numerous national-level research and industrialization projects and holds over 400 authorized patents, including more than 270 invention patents. He has made significant contributions to Jiangfeng Electronics’ entry into the ranks of world-class semiconductor chip companies and to the domestic development of ultra-high-purity materials and sputtering targets.
4. Wang Yuchun
Wang Yuchun, Deputy General Manager of Anji Microelectronics, is one of the early pioneers in the application of chemical-mechanical polishing to advanced processes in integrated circuits. He has led the Anji Microelectronics team to successfully develop a series of polishing slurries for copper/copper barrier layers, tungsten, oxides, and silicon vias, which have been mass-produced and adopted in logic chips at the 130-14nm technology node as well as in 3D NAND and DRAM chips, achieving domestic production. At the same time, he has made outstanding contributions to the client-side applications of polishing slurries and to the improvement of the upstream and downstream industrial chain.
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