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27

2021

-

09

Technology Breakthrough Award

Winning Project

12 248nm for the inch-level process line Photoresist Product Development and Mass Production Technologies

Winning Unit

Beijing Kehua Microelectronics Materials Co., Ltd.

Award Introduction

Starting from raw material development and formulation design and optimization, the Beijing Kehua R&D team has established a 248nm... Based on its photoresist technology platform, we have developed a series of photoresist products whose technical specifications and application performance are on par with those of similar international products. Our products cover process nodes ranging from 0.25 microns to 14 nanometers and have been adopted in mass production by leading domestic integrated circuit manufacturers.

 

Winning Project

12 Research and Application of Key Technologies for Electronic-Grade Sulfuric Acid Used in Advanced Process Manufacturing of Integrated Circuits in Inches

Winning Unit

Hubei Xingfu Electronic Materials Co., Ltd.

Award Introduction

Relying on its own resource advantages, Hubei Xingfu controls the high purity of sulfur trioxide right from the source and uses a proprietary process route to produce ultra-high-purity sulfuric acid. It has also achieved automation in product quality testing, with the number of elements detectable reaching up to 60. Diverse products have already achieved stable mass supply to customers using 8-12-inch advanced process technologies.

 

Winning Project

Hardmask Copper Damascus Process Etch Residue Remover

Winning Unit

Anji Microelectronics Technology (Shanghai) Co., Ltd.

Award Introduction

Through research and innovation into the removal mechanisms of next-generation photoresists, Anji Microelectronics has successfully developed a residue remover for hard-mask copper Damascene etching processes, achieving import substitution. The product is applicable to 40... Mass production applications achieved at the ~28nm technology node.

 

Winning Project

Research and Development and Industrialization of Ultra-High-Purity Hydrogen Chloride for Integrated Circuits

Winning Unit

China Shipbuilding Industry Corporation (Handan) Pairy Special Gas Co., Ltd.

Award Introduction

Perry Specialty Gases Co., Ltd. has developed a complete set of production processes and analytical methods covering gas production, filling, and analytical testing, and has successfully produced 5N-grade gases. High-purity hydrogen chloride gas—its product performance indicators have reached the level of similar international products and have already been applied in large quantities by domestic semiconductor companies.

 

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