Report on the Development Status of China’s Semiconductor Supporting Industries (Compiled in 2021)

This report is divided into two parts: Materials and Equipment. It analyzes the current industrial situation and development trends both domestically and internationally, market size, R&D and industrial development investments, patent status, workforce conditions, and existing challenges within the industry. The report was completed in June 2021.

As an essential link in the semiconductor and integrated circuit industry chain, the manufacturing sector of materials and specialized equipment for semiconductor fabrication plays a crucial, foundational role in industrial development. In early 2009, the Semiconductor Supporting Industries Branch of the China Semiconductor Industry Association began organizing its board member companies to conduct a survey on the current state of China’s semiconductor supporting industries. The aim was to gain a comprehensive understanding of key industry indicators such as overall industrial scale, product structure, technological level, and workforce composition. Based on this survey, the branch prepared a report on the development status of China’s semiconductor supporting industries, providing valuable reference information for relevant enterprises, government departments, and institutions. Since the establishment of the Integrated Circuit Materials Alliance in 2012, efforts to collect and analyze data on industry operating conditions have been further strengthened. Over the past decade and more, this work has attracted increasing attention from an ever-growing number of companies. As the number of companies participating in the survey has risen year by year, the overall picture of the industry has become increasingly clear.

We warmly welcome leaders, industry peers, and all friends who are concerned about the development of China’s semiconductor support industry to share your comments and suggestions with us. Your every perspective will greatly encourage and improve our work!

Secretariat of the Semiconductor Supporting Industries Branch, China Semiconductor Industry Association
Secretariat of the Integrated Circuit Materials Industry Technology Innovation Alliance
June 2021
 

Table of Contents

Part One: Semiconductor Materials 6
1 Current Status and Development Trends of the Global Semiconductor Materials Industry 6
1.1 General Situation 6
1.2 Wafer Manufacturing Materials 7
1.3 Encapsulation Materials 9
2 Trends in the Development of China’s Semiconductor Materials Market Demand 10
2.1 General Situation 11
2.2 Wafer Manufacturing Materials 12
2.3 Packaging Materials 13
3 Overview of China’s Semiconductor Materials Industry 14
3.1 General Situation 14
3.1.1 Sales Revenue 14
3.1.2 R&D Investment 18
3.1.3 Applying for an Invention Patent 19
3.1.4 Personnel: 21
3.2 Silicon Materials Industry 23
3.3 Photolithography Materials Industry 25
3.4 The Process Chemicals Industry 28
3.5 The Electronic Gases Industry 29
3.6 CMP Polishing Materials Industry 31
3.7 Sputtering Target Industry 33
3.8 Packaging Materials Industry 34
4. Issues and Reflections on China’s Semiconductor Materials Industry 37
4.1 The level of industrial technology still has room for improvement 37
4.2 The issue of homogenization in business operations is becoming increasingly serious. 37
4.3 The supply chain is incomplete, and there are bottlenecks in industrial development. 37
4.4 A severe shortage of high-end talent is hindering the innovative development of the industry. 38
Part II Semiconductor-Specific Equipment 39
1. Overview of the Global Semiconductor Specialized Equipment Development and Analysis of Industry Market Demand 41
1.1 Global Semiconductor Equipment Development Status in 2020 41
1.1.1 Overall Situation of the Global Semiconductor Equipment Market in 2020 41
1.1.2 Global Semiconductor Equipment Regional Market in 2020 42
1.1.3 Status of Major Global Semiconductor Equipment Companies in 2020 44
1.2 Analysis of the Global Semiconductor Equipment Market Demand in 2021 47
2. Development Status of China’s Semiconductor Special Equipment Industry 48
2.1 Industry Scale 48
2.2 Industrial Structure 49
2.3 Technical Level 52
2.4 Technology Investment 56
2.5 Intellectual Property 57
2.6 Industry Talent 58
3. Issues and Reflections on China’s Semiconductor Equipment Industry 59
3.1 Focus on technological R&D to achieve product iteration 60
3.2 Actively establish an equipment verification platform to accelerate equipment validation by 60.
3.3 Adhere to equipment enterprises as the main driving force and carry out verification of critical components. 60
3.4 Strengthen Policies for Talent Openness and Support 61

List of Figures
Figure 1: Global Trends in the Market for Wafer Manufacturing Materials/Packaging Materials, 2015–2022 6
Figure 2: Development Trends of the Global Semiconductor Materials Market by Region, 2015–2022 7
Figure 3: Global Market Size and Forecast for Wafer Manufacturing Materials, 2015–2022 8
Figure 4: Global Packaging Materials Market Size and Forecast, 2015–2022 10
Figure 5: Development Trend of Semiconductor Industry Sales in China, 2010-2020 11
Figure 6: Development Trend of the Chinese Market Size for Wafer Manufacturing Materials/Packaging Materials, 2015-2021 12
Figure 7: Market Structure of Wafer Manufacturing Materials in China, 2020 13
Figure 8: Market Structure of China’s Packaging Materials in 2020 14
Figure 9: Development Trend of Sales Revenue for Semiconductor Materials Companies, 2010–2021 15
Figure 10: Composition of Sales Revenue for Semiconductor Material Enterprises in 2020 15
Figure 11: Composition of 2020 Revenue from Products Used by Enterprises for Semiconductor Manufacturing/ Packaging 17
Figure 12: Sales Revenue of Sample Enterprises in the First Quarter of 2019–2021 17
Figure 13: R&D Investment by Specialized Field in Semiconductor Materials Enterprises, 2010–2020 18
Figure 14: Patent Application and Grant Status of Invention Patents for Semiconductor Material Enterprises, 2010–2020 19
Figure 15: Patent Application Status of Semiconductor Material Companies by Specialization from 2010 to 2020 20
Figure 16: Patent Grant Status of Semiconductor Material Companies by Specialization from 2010 to 2020 21
Figure 17: Total Number of Employees in Various Professional Fields of Semiconductor Material Enterprises in 2020 22
Figure 18: Staff Composition of Semiconductor Material Enterprises in 2020 (by Job Nature) 22
Figure 19: Staff Composition of Semiconductor Material Enterprises in 2020 (by Education Level) 23
Figure 20: Current Status and Development Forecast of the Global Silicon Wafer Market by Diameter 24
Figure 21: Sales Revenue of Silicon Material Enterprises, 2010-2020 25
Figure 22: Global Photoresist Market Structure in 2020 26
Figure 23: Growth in Sales Revenue of Photoresist Companies from 2010 to 2021 27
Figure 24: Growth in Sales Revenue of Process Chemical Companies from 2010 to 2021 29
Figure 25: Growth in Sales Revenue of Electronic Gas Companies from 2010 to 2021 31
Figure 26: Growth in Sales Revenue of Polishing Materials Enterprises from 2010 to 2021 32
Figure 27: Growth in Sales Revenue of Sputtering Target Companies from 2010 to 2021 34
Figure 28: Growth in Sales Revenue of Packaging Materials Companies from 2010 to 2020 36
Figure 29: Global Semiconductor Equipment Market, 2010–2020 41
Figure 30: China Semiconductor Equipment Market (SEMI), 2015-2020 43
Figure 31: Global Semiconductor Equipment Market Demand Forecast, 2020-2030, 48
Figure 32: Detailed Sales of Domestic Semiconductor Equipment, 2015–2020 49
Figure 33: Composition of Semiconductor Equipment Sales Revenue for Representative Companies in 2020 50
Figure 34: Projected Composition of Semiconductor Equipment Sales Revenue for Representative Companies in 2021 – 51
Figure 35: R&D Investment in China’s Semiconductor Equipment Industry – 56
Figure 36: Patent Applications and Grants in China’s Semiconductor Equipment Industry 57
Figure 37: Staff Composition of 20 Semiconductor Special Equipment Enterprises in 2020 59
Table 1: Global Market Size and Forecast for Wafer Manufacturing Materials, 2015–2022 8
Table 2: Current Status and Forecast of the Global Semiconductor Packaging Materials Market, 2015–2022 9
Table 3: China’s Market Size for Wafer Manufacturing Materials, 2015–2021 12
Table 4: China’s Semiconductor Packaging Materials Market Size, 2015–2021 14
Table 5: Corporate Sales Revenue by Specialty Area for Semiconductor Materials, 2010–2021 16
Table 6: Sales Revenue from Products Used by Enterprises for Semiconductor Manufacturing/Packaging, 2010-2021 16
Table 7: R&D Investment by Specialized Field in Semiconductor Materials Enterprises, 2010–2020 18
Table 8: Patent Application Status of Semiconductor Materials Enterprises by Specialized Field, 2010-2020 19
Table 9: Patent Grant Status of Semiconductor Materials Enterprises by Specialization from 2010 to 2020 20
Table 10: Comprehensive Statistical Data on 20 Representative Semiconductor Equipment Enterprises in China 40
Table 11: Global Semiconductor Industry Equipment Investment Expenditure 42
Table 12: Capital Expenditure on Semiconductor Equipment in Major Global Countries/Regions in 2020 44
Table 13: 2020 Global Revenue of Major Semiconductor Equipment Suppliers 45