Anhui Yagesheng Electronic New Materials Co., Ltd.'s scientific and technological achievement, "Key Technologies and Applications for the Preparation of Semiconductor-Grade Disilane," has passed the appraisal.

At 9:00 a.m. on May 26, 2021, the "Technical Achievement Appraisal Meeting on Key Technologies and Applications for the Preparation of Semiconductor-Grade Disilane," jointly applied for by Quan Jiao Yage Tai Electronic New Materials Technology Co., Ltd., Anhui Yage Sheng Electronic New Materials Co., Ltd., and Nanjing Yage Tai New Energy Materials Co., Ltd., was held in the conference room of the Tibet Building in Beijing.

The appraisal meeting was chaired by Hu Qianlin, Deputy Secretary-General of the China Petroleum and Chemical Industry Federation. The appraisal committee was headed by Academician Ren Qilong from Zhejiang University as its chairperson, and comprised seven experts: Dr. Li Yan, a second-level researcher at the Institute of Physical Chemistry of the Chinese Academy of Sciences; Professor Ren Zhongqi, Vice President of Beijing University of Chemical Technology; Shi Ying, Secretary-General of the Integrated Circuit Materials Industry Technology Innovation Alliance; Dr. Wang Luping, President of Jiangsu Nanda Optoelectronic Materials Co., Ltd.; Yan Dazhou, Chief Engineer of Luoyang Zhonggu Silicon High-Tech Co., Ltd.; and Dr. Ye Xiangrong, Professor at Zhejiang Normal University.

The experts of the appraisal committee listened to the work reports, research reports, novelty search reports, and application reports submitted by the implementing units, including Quanjiao Yage Tai Electronic New Materials Technology Co., Ltd., and reviewed the relevant documentation. After questioning and discussion, the experts of the appraisal committee unanimously concluded that this achievement addresses key technical challenges such as low yield and difficult purification in the synthesis of semiconductor-grade disilane. Through innovative development, it has realized the first-ever domestic mass production of semiconductor-grade disilane, with a product purity reaching 4.8N. The product has been applied in the production of products by Hefei Changxin Storage Technologies Co., Ltd. and has also been exported to renowned overseas semiconductor companies such as South Korea’s SK Hynix and Japan’s KIOKIA, yielding significant social and economic benefits. The experts of the appraisal committee unanimously agreed that this technological achievement has enabled the independent preparation of semiconductor-grade disilane, and its product technical indicators have reached the advanced level of similar international products. They approved the appraisal.

The experts attending the meeting fully affirmed that AGT’s “disilane” product has addressed the “bottleneck” issue concerning key materials for advanced processes in integrated circuits. They expressed hope that the company will continue to develop more new products with international competitiveness and influence, thereby driving technological progress in China’s related industries and providing strong support for the development of China’s integrated circuit industry!

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