Five-star product

The Five-Star Product Certificate is awarded to core critical material products that demonstrate high technological standards, excellent quality, large-scale application in multiple integrated circuit manufacturing facilities both domestically and internationally, and consistently stable supply.

	Winning Project	Winning Unit
1	Nitrogen trifluoride NF3	China Shipbuilding Industry Corporation (Handan) Pairy Special Gas Co., Ltd.
2	Tungsten hexafluoride WF6	China Shipbuilding Industry Corporation (Handan) Pairy Special Gas Co., Ltd.
3	Electronics-grade phosphoric acid H3PO4	Hubei Xingfu Electronic Materials Co., Ltd.
4	300mm Aluminum (Al) target	Ningbo Jiangfeng Electronic Materials Co., Ltd.
5	300mm Tantalum (Ta) ) Ring	Ningbo Jiangfeng Electronic Materials Co., Ltd.
6	300mm Copper (Cu) Anode	Ningbo Jiangfeng Electronic Materials Co., Ltd.
7	Copper Polishing Liquid Series	Anji Microelectronics Technology ( Shanghai) Corporation
8	Barrier Layer Polishing Liquid Series	Anji Microelectronics Technology ( Shanghai) Corporation
9	High-purity hydrofluoric acid for integrated circuit manufacturing	Zhongjuxin Technology Co., Ltd.
10	High-purity nitric acid for integrated circuit manufacturing	Zhongjuxin Technology Co., Ltd.
11	Arsine Safety Source	Jiangsu Nanda Optoelectronic Materials Co., Ltd.
12	Phosphine Safety Source	Jiangsu Nanda Optoelectronic Materials Co., Ltd.
13	Boron trifluoride safety source	Jiangsu Nanda Optoelectronic Materials Co., Ltd.
14	Electronics-grade carbon monoxide	Guangdong Huate Gas Co., Ltd.
15	Electronic-grade carbon dioxide	Guangdong Huate Gas Co., Ltd.
16	Chip Copper Interconnect Plating Solution SYS ^D2110	Shanghai Xinyang Semiconductor Materials Co., Ltd.

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