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19

2021

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04

Technology Breakthrough Award

Winning Project

Preparation Process for Ultra-High-Purity Hydrogen Fluoride for Integrated Circuits

Winning Unit

China Shipbuilding Industry Corporation (Handan) Pairy Special Gas Co., Ltd.

Award Introduction

Zhongchuan Heavy Industry (Handan) Pairy Special Gas Co., Ltd. has developed high-purity specialty gases—hydrogen fluoride and fluorine—through technological optimization and tackling challenging technical problems. The key impurity indicators in these products, such as moisture and metal content, have reached internationally advanced levels, fully meeting the requirements of cutting-edge domestic manufacturing processes. Pairy Gas is committed to taking on responsibilities and striving for excellence. Through continuous technological innovation and ongoing service upgrades, we will contribute our part to the advancement and self-reliance of China’s integrated circuit industry.

 

Winning Project

Research and Development and Industrialization of Key Technologies for Disilane

Winning Unit

Anhui Yagesheng Electronic New Materials Co., Ltd.

Award Introduction

Anhui Yagesheng Electronic New Materials Co., Ltd. specializes in the independent development of advanced-process thin-film deposition materials. After years of intensive technological research, we have finally achieved a breakthrough with 20nm... The key silicon-source material—disilane—for advanced semiconductor processes has been successfully industrialized and has reached an internationally advanced level, filling a domestic gap. The product is now sold to leading international semiconductor companies.

 

Winning Project

12 Inch Wafer Copper Process CMP Polishing pad industrialization technology

Winning Unit

Hubei Dinghui Microelectronics Materials Co., Ltd.

Award Introduction

Hubei Dinghui Microelectronics Materials Co., Ltd. has been operating since 2012. We began research and development of CMP process materials in [Year]. We have now developed 12-inch wafer copper-process CMP polishing pad technology and products for integrated circuits, possessing independent intellectual property rights. The product quality has reached the advanced level of similar foreign products. Furthermore, we invested over 500 million yuan to build an industrial-scale production facility with an annual capacity of 200,000 polishing pads. These pads are already being sold on a large scale to multiple fab facilities, laying a solid foundation for independently developing CMP polishing pad technology and driving the growth of the industry.

 

Winning Project

6N for integrated circuits Industrialization Technology for Phosphine and Arsenic Hydride Gases

Winning Unit

Jiangsu Nanda Optoelectronic Materials Co., Ltd.

Award Introduction

Jiangsu Nanda Optoelectronic Materials Co., Ltd. adheres to a spirit of pioneering, striving for excellence, scaling new heights, and creating great achievements. The company remains steadfastly committed to technological breakthroughs and product development in the field of high-purity electronic materials. It has successfully mastered the technologies for preparing ultra-high-purity arsine and phosphine, as well as the independent design and manufacturing technologies for safe ion implantation sources. This has filled a critical gap in China’s product offerings in this area and effectively ensured the supply of safe ion implantation sources needed for integrated circuit manufacturing in China.

 

Winning Project

12 for integrated circuits Complete Preparation Technology for Ultra-High-Purity Copper Targets in Inches

Winning Unit

Youyan Yijin New Materials Co., Ltd.

Award Introduction

Youyan Yijin New Materials Co., Ltd. has been deeply engaged in the field of high-purity metal targets for integrated circuits for over a decade. Through dedicated scientific research and independent innovation, the company has successfully overcome the challenge of 12... A complete set of preparation technologies for ultra-high-purity copper targets in inches has been developed, and an industrial production line has been established. The product quality and technical processes have reached internationally advanced levels, making a significant contribution to the independent and controllable development of key target materials for China’s integrated circuits.

 

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