Introduction to the Group Standard “Hexachlorosilane for Integrated Circuits”

I. Standard Background

High-purity hexachloroethane silane is a special gas with stable performance, low volatility, and humidity sensitivity. It is primarily used in the semiconductor industry for the preparation of silicon oxide and silicon nitride films and holds broad application prospects in fields such as semiconductors and optoelectronic materials. Compared to conventional silicon oxide and silicon nitride films prepared by chemical vapor deposition, hexachloroethane silane enables lower deposition temperatures, lower deposition pressures, and higher deposition efficiency. Moreover, the films produced using this method exhibit superior density, insulation properties, corrosion resistance, and compatibility.

Currently, domestic demand for hexachlorodisilane in China has been growing year by year, and most of it still relies on imports. In recent years, China has gradually increased its research and development investment in high-purity hexachlorodisilane. Several companies have now developed their own production technologies and have begun mass production, gradually expanding into both domestic and international markets. However, during the marketization phase, uneven technical standards as well as inconsistent requirements for filling and transportation have left enterprises operating in isolation, each developing their own solutions independently. Therefore, it is urgently necessary to establish a set of standards that are tailored to China’s current technological and application levels, thereby breaking free from the passive reliance on imports.

II. Standard Development

Prior to this, national standards, industry standards, and... SEMI There are currently no product standards for hexachlorosilane available in any industry standards, so the formulation and release of the group standard “Hexachlorosilane for Integrated Circuits” promptly fills this gap in the industry and provides guidance for domestic enterprises in the production of high-purity hexachlorosilane products.

The participating organizations in the development of the group standard "Hexachloroethane Silane for Integrated Circuits" include Luoyang Zhonggui High-Tech Co., Ltd., Jiangsu Nanda Optoelectronic Materials Co., Ltd., Jiangsu Yak Technology Co., Ltd., and Zhongjuxin Technology Co., Ltd. These organizations represent China’s leading R&D and production entities for hexachloroethane silane, and the standard has been developed with extensive input from upstream and downstream stakeholders, ensuring high representativeness and practical feasibility. The development process of this group standard was conducted strictly in accordance with the Alliance’s “Standard Development Procedures” and took a considerable amount of time. 14 months at 2020 Year 2 Moon 24 Officially released.

III. Main Contents of the Standard

The main content of this standard includes the following sections:

Among these, the “Technical Requirements” integrate user demands and the current domestic production situation, and are categorized according to the intended uses of hexachlorosilane products. A 、 B Two levels, A The grade can be directly used by integrated circuit customers. B The product, refined and purified from raw material grade, meets the usage requirements of integrated circuit users. The technical specifications are as follows:

The section titled “Determination of Constituents” specifies the types of instruments to be used, including gas chromatographs and chromatographic columns, as well as the purity requirements for carrier gases and purge gases. It also provides recommended chromatographic conditions, covering parameters such as column length, detector temperature, inlet temperature, oven temperature, carrier gas flow rate, purge gas flow rate, and split ratio. In addition, it outlines the calculation formulas and presentation methods for analyzing the results.

“The Determination of Impurity Element Content” specifies the types of inductively coupled plasma mass spectrometers, electronic balances, and laboratoryware; as well as the requirements for clean environments, ultrapure water, nitric acid, hydrofluoric acid, and standard stock solutions; and describes the recommended analytical procedures.

This standard also specifies the packaging and transportation requirements for hexachlorosilane products and includes a “Safety Data Sheet for Hexachlorosilane” as an appendix, facilitating the reading and use of the standard.

The group standard “Hexachlorosilane for Integrated Circuits” is provided free of charge in electronic format to alliance members. Units with a need are requested to send an email to: liuyan@icmtia.com Contact: Liu Yan.

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