Announcement of the Group Standard T/ICMTIA 3-2020 “Hexachlorosilane for Integrated Circuits”

To all relevant units:

In accordance with the "Regulations on the Administration of Group Standards" and the "Procedures for Developing Standards of the Integrated Circuit Materials Industry Technology Innovation Alliance," and following review and approval by the Alliance Standards Committee, we hereby approve and release the following: T/ICMTIA 3-2020 Group Standard for Hexachlorosilane for Integrated Circuits.

This standard was issued on 2020 Year 2 Moon 24 Released daily, and on 2020 Year 4 Moon 24 Effective from today, this is hereby announced.

Integrated Circuit Materials Industry Technology Innovation Alliance

February 24, 2020

T/ICMTIA 3-2020 Catalog of the Group Standard “Hexachlorosilane for Integrated Circuits”

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