Notice of Approval for Group Standard Development

To All Relevant Organizations: Following review by the Standards Committee of the Integrated Circuit Materials Industry Technology Innovation Alliance (hereinafter referred to as ICMTIA), we have decided to initiate the development of the following six group standards: 2019-10LX-ICMTIA: “Solid ArF Photoresist Monomers for Integrated Circuits” 2019-11LX-ICMTIA: “Liquid ArF Photoresist Monomers for Integrated Circuits” 2019-12LX-ICMTIA: “Dry ArF Photoresists for Integrated Circuits” 2019-13LX-ICMTIA: “Immersion ArF Photoresists for Integrated Circuits” 2019-14LX-ICMTIA: “Methods for Testing Photoresists Used in Integrated Circuits” 2019-15LX-ICMTIA: “300mm Silicon Epitaxial Wafers for Integrated Circuits” The project management authority is the ICMTIA Standards Committee. We welcome research institutions, relevant enterprises, end-users, and other organizations with expertise in these areas to join the drafting and development of these standards. Interested parties are invited to contact the Standards Committee Office. If any organization or individual has objections to the above-mentioned standard projects, please submit your feedback to the Standards Committee Office within 10 working days from the date of this announcement. Contact: Liu Yan Phone: 010-82358415 Email: liuyan@icmtia.com Integrated Circuit Materials Industry Technology Innovation Alliance June 17, 2019

To all relevant units:

Following review by the Standards Committee of the Integrated Circuit Materials Industry Technology Innovation Alliance (referred to as ICMTIA), we have now decided to initiate the development of the following six group standards:

2019-10LX-ICMTIA “Solid ArF Photoresist Monomer for Integrated Circuits”

2019-11LX-ICMTIA “Liquid ArF Photoresist Monomer for Integrated Circuits”

2019-12LX-ICMTIA “ArF Dry Photoresist for Integrated Circuits”

2019-13LX-ICMTIA “ArF Immersion Photoresist for Integrated Circuits”

2019-14LX-ICMTIA “Photolithographic Resist Testing Method for Integrated Circuits”

2019-15LX-ICMTIA “300mm Silicon Epitaxial Wafers for Integrated Circuits”

The project is managed by the ICMTIA Standards Committee. Research institutions, relevant enterprises, and user organizations that are interested in this standard are welcome to join the drafting and development process. Interested parties are requested to contact the Secretariat of the Standards Committee.

If any organization or individual has objections to the above-mentioned standard items, please submit your feedback to the Standards Committee Office within 10 working days from the date of this announcement.

Contact: Liu Yan

Phone: 010-82358415

Email: liuyan@icmtia.com

Integrated Circuit Materials Industry Technology Innovation Alliance

June 17, 2019

Key words: