World-class, China-made polyfluoro electronic-grade chemicals make their debut at the semiconductor exhibition, achieving import substitution.

    2019 Year 3 Moon 20 To 22 Day, by the International Semiconductor Equipment and Materials Industry Association ( SEMI) and the China Electronic Commerce Association ( CECC ) The world’s largest and most prestigious annual event for the semiconductor industry—co-organized by... SEMICON China 2019 The event is being held at the Shanghai New International Expo Center. Duofluoride is showcasing a range of products, including electronic-grade hydrofluoric acid, electronic-grade sulfuric acid, electronic-grade nitric acid, and silane.

Electro-grade hydrofluoric acid is one of the high-end chemical materials used in the manufacturing processes of integrated circuits (ICs) and very-large-scale integration (VLSI) chips, primarily for chip etching. In 2018, Duofluoride’s electro-grade hydrofluoric acid established cooperative relationships with numerous domestic semiconductor customers producing 8-inch and 12-inch wafers, and successfully entered the supply chains of multinational semiconductor companies in the U.S., South Korea, and other regions. The product quality has reached the industry’s highest level—UP-SSS grade—and has steadily achieved import substitution.

There are only a handful of companies worldwide that possess the highest-quality electronic-grade hydrofluoric acid production lines, and Duofluor has become one of them thanks to its 30 years of innovative expertise in the fluorine chemicals industry. Duofluor is a leading enterprise in fine inorganic fluorine chemistry, renowned for its advanced technological processes, and was China’s first publicly listed company in the inorganic fluorine chemicals sector (stock code: 002407). The company boasts R&D institutions such as a nationally recognized Enterprise Technology Center, a nationally accredited laboratory, and a National Postdoctoral Research Workstation. It has spearheaded the formulation and revision of over 100 national standards—including product standards, analytical method standards, reference materials, and production technology specifications—for inorganic fluorides, placing it at the forefront of new materials systems development. In 2012, Duofluor completed construction of an ultra-clean, high-purity electronic-grade hydrofluoric acid production line designed to meet UP-SS grade standards. Through independent innovation and process optimization, the company has further enhanced its product quality to UP-SSS grade, with a current production capacity of 10,000 tons. Its products are widely used in various fields, including semiconductor manufacturing processes, semiconductor lighting, crystalline silicon solar energy, and flat-panel displays. Duofluor employs a DCS automated control system, ultra-clean, high-purity PFA double-pipe conveying systems, Class 10,000 automated cleaning facilities, Class 1,000 automated filling equipment, and Class 100 sampling and analysis systems. Equipped with globally advanced testing instruments and equipment, the company ensures continuous and stable process control, with product specifications surpassing the industry-standard UP-SS/SEMI-C12 level and reaching internationally leading standards. Currently, Duofluor is actively promoting the substitution of imported HF within numerous domestic fabs, and its hydrofluoric acid products have already been adopted on a large scale by several domestic semiconductor manufacturers. In addition to the 10,000-ton-per-year electronic-grade hydrofluoric acid production facility, Duofluor is planning and constructing projects for the production of 30,000 tons per year of electronic-grade sulfuric acid, 10,000 tons per year of electronic-grade nitric acid, electronic-grade ammonia solution, and electronic-grade ammonium fluoride.

In April 2018, Duofluoride acquired Zhejiang Zhongning Silicon Industry, establishing a “Southern Base” for China’s electronic chemicals and creating complementary advantages between wet and dry electronic chemicals. Zhongning Silicon Industry is China’s first domestic manufacturer to achieve industrial-scale production of silane, and currently the only Chinese company simultaneously active in the photovoltaic, TFT, and semiconductor industries as a silane supplier. Zhongning Silicon Industry boasts internationally advanced silane-production technology; its flagship products—silane and polysilicon—reached electronic-grade purity as early as 2011. These products are used in the semiconductor, liquid-crystal display, and photovoltaic industries, with product quality matching that of comparable foreign brands. The company has an annual production capacity of 3,000 tons of polysilicon and 4,000 tons of high-purity silane, with production processes and product quality at world-leading levels, aiming to replace imported supplies. It also offers more than 60 types of specialty electronic gases, including hydrogen, nitrous oxide, and helium. Currently, Zhongning Silicon Industry is investing in the construction of projects such as nano-silicon powder, electronic-grade silicon tetrafluoride, electronic-grade chlorosilanes, fluoronitrogen mixed gases, and electronic-grade polysilicon, paving the way for more new chemical materials to enter the global market.

The rapid development of Duofudo in the new materials sector has attracted keen attention from numerous semiconductor companies both at home and abroad. During the exhibition, Duofudo met with representatives from chip companies, silicon wafer manufacturers, and upstream and downstream customers from the United States, Japan, South Korea, Taiwan, and China. The company engaged in business discussions and in-depth exchanges on topics such as business cooperation, cutting-edge technologies, and industry trends.