Youyan Yijin’s ultra-high-purity nickel-platinum targets and cobalt targets make their debut at the “Large-Scale Exhibition Celebrating the 40th Anniversary of Reform and Opening-up.”

In early November 2018, at the National Museum, during the large-scale exhibition “Great Transformation—Celebrating the 40th Anniversary of Reform and Opening-up,” 12-inch ultra-high-purity NiPt targets and 12-inch ultra-high-purity Co targets—developed under the key special project “Technological Advancement and Industrialization of Key Basic Materials” supported by the National Key R&D Program—made a stunning appearance. These breakthroughs mark a significant milestone achieved through independent research and development in China’s critical basic materials field for integrated circuits. In semiconductor devices, NiPt alloy targets and Co targets with ferromagnetic properties are used to fabricate Schottky diodes.

In early November 2018, at the National Museum, during the large-scale exhibition “Great Transformation—Celebrating the 40th Anniversary of Reform and Opening-up,” 12-inch ultra-high-purity NiPt targets and 12-inch ultra-high-purity Co targets—developed under the key special project “Technological Advancement and Industrialization of Key Basic Materials” supported by the National Key R&D Program—made a stunning appearance. These breakthroughs, achieved through independent R&D in China’s critical basic materials field for integrated circuits, mark a significant milestone in our country’s technological advancement.

In semiconductor devices, NiPt alloy targets and Co targets with ferromagnetic properties are ideal materials for fabricating Schottky diodes and contact layers in large-scale integrated circuits. However, due to the extreme difficulty in preparing ultra-high-purity NiPt alloys and Co raw materials, as well as the inherent magnetic properties of these materials that can adversely affect the magnetron sputtering performance of the targets, the fabrication of these two types of targets is extremely challenging. For a long time internationally, only one company in Japan has been able to produce large-size, high-permeability, ultra-high-purity NiPt targets and Co targets.

With support from the key special project “Technological Advancement and Industrialization of Key Basic Materials” under the National Key R&D Program, Youyan Yijin New Materials Co., Ltd. has successfully mastered several critical technologies in the preparation of large-size ferromagnetic targets, including ultra-high-purity melting and casting, uniform control of composition and microstructure, synergistic regulation of magnetic properties, highly reliable large-area welding of dissimilar metals, precision machining, and surface treatment. The company has developed 12-inch ultra-high-purity NiPt targets and 12-inch ultra-high-purity Co targets with exceptionally high permeability—specifically designed for use in deep nanometer integrated circuit chips. These targets achieve permeabilities of over 20% and 70%, respectively. The products have already been validated by several internationally renowned semiconductor manufacturers, breaking the foreign monopoly in this field. The achievement of these breakthroughs is of great significance for enhancing China’s independent supply of key basic materials for the electronic information industry and strengthening the core competitiveness of the integrated circuit industry.

Exhibition venue

12-inch Co target

12-inch NiPt target

Key words: