The Materials and Components Alliance Electronic Gases Standards Working Group Meeting was successfully held in Beijing.

On August 6, 2018, the Electronic Gases Standards Working Group Meeting, hosted by the Standards Committee of the Integrated Circuit Materials and Components Industry Technology Innovation Strategic Alliance (hereinafter referred to as the “Alliance Standards Committee”), was held in Beijing. The Alliance’s Standardization Working Committee was established at the end of 2017 and has completed registration and public announcement on the “National Group Standards Information Platform.” Currently, the Alliance has 11 standards under development, and 10 standards have been drafted and entered the stage of soliciting comments. At this meeting, in response to the joint needs of integrated circuit manufacturing enterprises and electronic gas suppliers, the composition of the Alliance Standards Committee was expanded, with a particular focus on incorporating representatives from SMIC International Integrated Circuit Manufacturing.

On August 6, 2018, the Electronic Gas Standards Working Group Meeting, hosted by the Standards Committee of the Integrated Circuit Materials and Components Industry Technology Innovation Strategic Alliance (hereinafter referred to as the “Alliance Standards Committee”), was held in Beijing.

The Alliance Standardization Working Committee was established at the end of 2017 and has completed its registration and public announcement on the “National Group Standards Information Platform.” Currently, the Alliance has 11 standards approved for development, and 10 of these standards have been drafted and entered the stage of soliciting comments.

Based on the shared needs of integrated circuit manufacturing companies and electronic gas suppliers, this meeting has expanded the composition of the alliance’s technical committee. In particular, it has actively recruited engineering and quality management technical experts from manufacturing enterprises such as SMIC, Shanghai HuaHong Macro Semiconductor Manufacturing Co., Ltd., Shanghai Huali Microelectronics Co., Ltd., Wuhan Xinxin Integrated Circuit Manufacturing Co., Ltd., and Wuxi CR Microelectronics Co., Ltd., in order to meet the growing demands for rapidly advancing electronic gas technology levels, enhancing quality assurance capabilities, and supporting mass production applications.

This meeting focused on an in-depth exchange regarding the technical standards, product specifications, and supplier qualification requirements for electronic gases used in advanced integrated circuit manufacturing. The meeting also systematically studied the architecture of the electronic gas standards system and developed a framework for basic electronic gas standards.

The meeting also discussed and approved the proposal to initiate two group standards: “Octafluorocyclobutane for Semiconductor Manufacturing” and “Carbon Dioxide for Semiconductor Manufacturing.”

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