The special projects “R&D and Industrialization of 200mm SOI Wafers” and “Research on Novel Silicon-Based Strain Materials,” undertaken by the alliance’s member units, have successfully passed acceptance testing.

On January 4, 2014, the Implementation Management Office and the Overall Expert Group of the National Key Science and Technology Special Project “Manufacturing Equipment and Complete Process Technologies for Ultra-Large-Scale Integrated Circuits” (Project 02) organized an acceptance expert panel that conducted an acceptance review in Shanghai for two projects: “Research and Industrialization of 200mm SOI Wafers” and “Research on Novel Silicon-Based Strain Materials.” After listening to and reviewing the project acceptance reports, user application reports, on-site testing and documentation review reports, and project audit reports submitted by the acceptance expert panel, both projects successfully passed the acceptance review. The “Research and Industrialization of 200mm SOI Wafers” project was led by Shanghai Xin...

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2014 Year 1 Moon 4 Day, the national major science and technology project “Manufacturing Equipment and Complete Process for Ultra-Large-Scale Integrated Circuits” ( 02 The Special Implementation Management Office and the Overall Expert Group organized an acceptance expert panel to conduct the acceptance assessment in Shanghai. 200mmSOI The projects “R&D and Industrialization of Wafers” and “Research on Novel Silicon-Based Strain Materials” have both successfully passed acceptance testing. After the acceptance expert panel listened to and reviewed the project acceptance reports, user feedback reports, on-site test and documentation review reports, and project audit reports, both projects were smoothly approved.

“ 200mmSOI The “Wafer R&D and Industrialization” project is undertaken by Shanghai New-Ao Technology Co., Ltd. The project focuses on... SIMOX 、 Bonding 、 Simbond 、 BEST – SOI Wait SOI The preparation technology has been systematically developed, and the project’s R&D objectives have been successfully achieved. All technical indicators have met the assessment requirements. Building on this foundation, further development has been carried out. DZ Process, Cavity – SOI and new processes and technologies, for SOI Further technological advancements have laid a solid foundation. Through the implementation of this project, Xin'ao Company has built China's first... 200mmSOI The wafer production line sells its products to numerous domestic and international customers.

The “Research on Novel Silicon-Based Strain Materials” project is jointly undertaken by the Shanghai Institute of Microsystem and Information Technology of the Chinese Academy of Sciences and Tsinghua University. The project has developed technologies for the growth of silicon-based strain materials and has successfully fabricated strain silicon on insulators, germanium-silicon on insulators, strain silicon on bulk silicon, and germanium-silicon on bulk silicon. 4 The substrate material was grown, and device verification was performed. The project successfully developed hydrogen-trapping delamination. Simsplit Technology, low-defect-density relaxation SiGe Innovative technologies such as epitaxial technology. Through the implementation of this project, the undertaking unit has established a new R&D platform for silicon-based strain materials and has cultivated a highly experienced research team specializing in these novel silicon-based strain materials.

This time 02 The successful acceptance of the two projects in the specialized materials field marks China's... SOI R&D capabilities in wafers and silicon-based strain materials have been elevated to a new level.

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