Materials Alliance Organizes a Seminar on Resource Recovery from Waste Generated by Semiconductor Manufacturing Processes

Statistical data show that China’s manufacturing sectors—including integrated circuits, flat-panel displays, and solar cells—consume approximately 700,000 tons of chemicals and metal targets annually, generating about 500,000 tons of waste chemicals and metal targets each year. The disposal of these wastes requires enormous financial resources, and most of the waste chemicals are treated by methods such as incineration or neutralization followed by landfilling, which not only leads to resource wastage but also increases the burden of environmental remediation. On March 10, 2015, the Materials Alliance, in collaboration with the China Semiconductor Industry Association, organized a “Semiconductor Manufacturing Process Waste Resource Utilization Technology Seminar” in Beijing. The seminar focused on resource utilization technologies for waste generated during semiconductor manufacturing processes and related industry practices.

Statistical data show that China’s manufacturing sectors—including integrated circuits, flat-panel displays, and solar cells—consume approximately 700,000 tons of chemicals and metal targets each year, generating about 500,000 tons of waste chemicals and metal targets. The disposal of these wastes requires enormous financial resources, and most of the waste chemicals are treated by methods such as incineration or neutralization followed by landfilling, which not only leads to resource wastage but also increases the burden of environmental remediation. On March 10, 2015, in Beijing, the Materials Alliance, together with the China Semiconductor Industry Association, organized a “Semiconductor Manufacturing Waste Resource Utilization Technology Seminar,” during which participants discussed topics including technologies for the resource utilization of waste generated by semiconductor manufacturing processes, the development of relevant industry standards, win-win business models for the industrial chain, and industry regulation.

The participating delegates discussed the types and quantities of major wastes generated during semiconductor manufacturing processes, as well as existing waste treatment methods, business channels, and associated costs. They also examined technologies for the recovery and reuse of key wastes produced in semiconductor manufacturing processes and proposed measures for waste resource utilization. All participants unanimously agreed that, with the rapid expansion of China’s integrated circuit, flat-panel display, and solar cell industries, the volume of waste generated during these processes will increase significantly. However, China’s waste resource utilization industry is still at an early stage of development. In particular, technologies for recycling and purifying waste materials have yet to be thoroughly developed, and there are currently no leading or backbone enterprises in this field. Moreover, numerous restrictions remain in place regarding industry entry and operation. There is an urgent need to strengthen research and development of key technologies for the separation of critical process chemical effluents, removal of metallic impurities, regeneration and reuse, and circular utilization. Furthermore, it is essential to conduct studies on industry standards and establish operational and regulatory models for the chemical and metal recycling industry through demonstration applications and industrial-scale projects. This will help promote the development of the chemical and metal recycling industry and guide the advancement of green manufacturing in the electronic information sector.

The participating delegates unanimously agreed that a proposal on “Comprehensive Utilization of Waste Resources Generated from Semiconductor Manufacturing Processes” should be formulated as soon as possible. They also suggested leveraging the Ministry of Science and Technology’s call for priority launch of key R&D tasks under the 13th Five-Year Plan to put forward implementation plan recommendations, further substantiate and refine these proposals, and strive for support from relevant national ministries and commissions to advance the related work.

Xu Xiaotian, Executive Vice Chairman of the China Semiconductor Industry Association, stated: "Prioritizing environmental protection, energy conservation, and social responsibility is the guiding principle behind the China Semiconductor Industry Association's environmental efforts. Building on our active response to the government's call for energy savings and emission reductions, the Association will fulfill its commitment to the World Semiconductor Council by continuously increasing annual semiconductor manufacturing capacity while striving to control and reduce carbon emissions. We will also actively promote the reuse and resource recovery of waste generated during manufacturing processes."

The representatives attending this seminar include Xu Xiaotian, Executive Vice Chairman of the China Semiconductor Industry Association; Shi Ying, Secretary-General of the Materials Alliance; representatives from the ESH Working Group of the China Semiconductor Industry Association; representatives from the Global Supply Chain Organization and Management Department of BOE Technology Group; and representatives from companies including Shijiazhuang Chengzhi Co., Ltd., Greenland Chemical, Hubei Xingfu, Zhejiang Kaisheng, Jiangfeng Electronics, and Youyan Yijin.

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