The joint project between China Electronics Technology Group Corporation No. 45 and HuaHai Qingke has received support under the “02 Special Project.”

The “Materials Industrialization” project has been officially approved. This project is a sub-project under the National Key Science and Technology Special Project “Manufacturing Equipment and Complete Process Technologies for Ultra-Large-Scale Integrated Circuits” (Project 02). The project’s implementation period is from 2015 to 2018. It will focus on the R&D of a complete set of CMP equipment capable of “dry-in, dry-out” for 300mm wafers in the 28-14nm technology node, along with associated supporting materials and processes, and will achieve industrial-scale production. The anticipated product performance indicators are expected to reach internationally advanced levels. Introduction to the 45th Research Institute of China Electronics Technology Group Corporation: Established in 1958, the 45th Research Institute of China Electronics Technology Group Corporation is a domestic institution specializing in electronic components.

The “Materials Industrialization” project has been officially approved. This project is part of the National Key Science and Technology Special Project, “Manufacturing Equipment and Complete Process Technologies for Ultra-Large-Scale Integrated Circuits.” 02 a sub-project of the special initiative, with a project implementation period of 2015 Year— 2018 Year, will be developed. 300mm Wafer 28-14nm "Get things done and make a real difference" CMP A complete set of processes for the entire equipment and its associated supporting materials, along with industrial-scale implementation, is expected to achieve product performance indicators that reach internationally advanced levels.

— Introduction to the 45th Research Institute of China Electronics Technology Group Corporation :

The 45th Research Institute of China Electronics Technology Group Corporation was founded in... 1958 The company is a national key research and production unit in China specializing in the technological development, system integration, and application process research of critical process equipment for electronic components, as well as the manufacturing of such equipment. 45 Therefore, the specialized fields of optical microfabrication and precision machinery and system automation are supported by six common key technologies: machine vision technology, motion control technology, precision motion stages and material handling systems technology, design optimization and high-efficiency manufacturing technology for precision components, research on equipment application processes and physicochemical technologies, and whole-machine system integration technology. Focusing on five key technological areas—integrated circuit manufacturing equipment, semiconductor lighting device manufacturing equipment, photovoltaic cell manufacturing equipment, optoelectronic component manufacturing, and system integration and services—we have developed electronic material processing equipment, chip manufacturing equipment, and optical... / Sound / Eight major categories of process equipment and products—including electrical testing equipment, chemical processing equipment, advanced packaging equipment, electronic graphic printing equipment, crystal components, and photovoltaic cells—serve four key industries: integrated circuits, optoelectronic components and assemblies, semiconductor lighting, and solar photovoltaic cells.

— Introduction to Tianjin Huahai Qingke Mechanical and Electrical Technology Co., Ltd. :

Tianjin Huahai Qingke Electromechanical Technology Co., Ltd. is a company established by the Tianjin Municipal Government and Tsinghua University in implementation of the national strategy of “Beijing-Tianjin-Hebei Integration,” with the aim of promoting chemical mechanical polishing (CMP) in China. CMP A high-tech enterprise established through the industrialization of technology and equipment. Hua Hai Qing Ke was founded... 2013 Year, primarily engaged in CMP R&D, manufacturing, sales, and service of equipment. The core team members of the company come from Tsinghua University and leading companies in the industry, and the company possesses... CMP Technical patent 100 The remaining items are currently the only ones in China with both R&D and production capabilities. 12 Inch ( 300mm Copper CMP An enterprise with comprehensive equipment capabilities. The company’s products can be widely applied in: IC Manufacturing, TSV/3D Encapsulation, MEMS the fields of wafer and substrate manufacturing, etc.

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