TSMC and ITRI have developed a particle monitoring system to improve yield.

Taipei—The Industrial Technology Research Institute (ITRI) of Taiwan and TSMC have developed a new system that can monitor particles in liquids during the chip manufacturing process, particles that could potentially cause defects. This system, named SuperSizer, is capable of measuring particles ranging in size from 3 nm to 1,000 nm, thereby extending beyond the current 40-nm limit of existing monitoring and inspection tools. The system can also measure particle concentration, helping to reduce impurities and scratches on the chip’s substrate and structure. TSMC has already begun using the SuperSizer system in its CMP process and has demonstrated that it can significantly reduce CM.

Taipei — Industrial Technology Research Institute of Taiwan ( ITRI ) and TSMC ( TSMC A new system has been developed that can monitor particles in liquids during the chip manufacturing process, which could potentially cause defects.

This system is named SuperSizer , can measure dimensions from 3nm To 1,000 nm particles, expanding the current monitoring and inspection tools. 40nm Upper limit. This system can also measure particle concentration, helping to reduce impurities and scratches on the chip’s substrate and structure.

TSMC Already in CMP Used during the process SuperSizer system, and demonstrate that this system can reduce CMP Reduce defect rates and scratches, and increase productivity.

ITRI Research Leader of the Nanotechnology and Mechanical Measurement Laboratory Wei-En Fu In EE Times In the interview, he said, “Over the past two to three years, due to particle issues, TSMC has had to shut down entire production lines for two to three days. As technology nodes advance into next year or…” 2017 Annual decline to 10 Nanometers—harmful particles will be smaller than. 10 Nano. This is the only tool capable of measuring particles this small in situ.

ITRI and TSMC of the SuperSizer A part of it: “The nebulizer module is used to convert particles in the solution into an aerosol.”

When only a handful of chip manufacturers are conducting R&D. 10nm During the process, ITRI indicates SuperSizer Particles in most size ranges can be monitored using less advanced processes.

Wei-En Fu said, “Most chip manufacturers hope to monitor” 30nm or 20nm Particles of the following particle size, “this” ITRI The system can monitor particles within this range by adjusting its settings. It can also measure particles at relatively low concentrations.

Wei-En Fu Also stated that one SuperSizer The price of the unit is determined by the type of features it offers and is approximately: $730,000 If it’s used only for monitoring pure water, the price is approximately... $450,000 This system can monitor four types of polishing liquids as well as the cleaning water.

ITRI Owning this technology and its related patents allows us to accept orders for manufacturing this system; however, the research institution plans to ultimately license the rights to a Taiwanese company for mass production.

ITRI The Nanotechnology and Mechanical Measurement Laboratory has approximately four ongoing projects related to the semiconductor industry, including the use of... x Light refractive index measurement, film thickness measurement, measurement CMP Instrument for measuring the surface roughness of medium-polishing pads, utilizing EUV Key characteristics of the scattering measurement chip, etc.

SuperSizer— Ultrafine Particle Classification System

ITRI It is one of the world’s largest government-funded R&D institutions and also houses other departments related to the semiconductor industry, such as materials and optoelectronic technologies. As Taiwan’s largest chip manufacturer, TSMC and UMC is from ITRI Spun off from the initial project.

— Alan Patterson Responsible for EE Times According to the semiconductor industry report, he is currently in Taiwan.

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