On August 6, 2018, the meeting of Electronic Gas Standards Working Group sponsored by the Standards Committee of the Integrated Circuit Materials & Components Industry Technology Innovative Alliance (hereinafter referred to as the “Standards Committee of the Alliance”) was held in Beijing.
The Standards Committee of the Alliance, established at the end of 2017, has been registered and publicized on the “National Group Standards Information Platform”. At present, 11 standards of the Alliance have been approved, and 10 standards have been drafted and entered into the stage of soliciting opinions.
According to the common needs of integrated circuit manufacturing companies and electronic gas suppliers, engineering and quality management technical experts from manufacturing companies including Semiconductor Manufacturing International Corporation, Shanghai Huahong Grace Semiconductor Manufacturing Co., Ltd., Shanghai Huali Microelectronics Corporation, Wuhan Xinxin Semiconductor Manufacturing Co., Ltd., and Wuxi China Resources Microelectronics Co., Ltd. participated in the meeting to expand the composition of the Standards Committee of the Alliance, so as to meet the needs of rapidly improving the level of electronic gas technology, quality assurance and the application of mass production.
Deep exchanges focusing on the requirements of high-level integrated circuit manufacturing for the technical level, product specifications, and supplier qualifications of electronic gas have been carried out in the meeting, which systematically studied the standard system architecture of electronic gas, and developed a standard framework for electronic gas basic norms.
The proposal for approval of two group standards, “Octafluorocyclobutane for Semiconductor Manufacturing” and “Carbon Dioxide for Semiconductor Manufacturing” was discussed in the meeting.