From May 28 to 29, the 2015 Planarization Technology Conference & Cross-Strait Cross-Strait Planarization Technology Forum was successfully held in Tsinghua University. Under the guidance of China Semiconductor Industry Association, Micro-Nano Manufacturing Tribology Professional Committee and the Integrated Circuit Materials & Components Industry Technology Innovative Alliance, the conference was sponsored by China Planarization Technology Alliance and undertook by Tsinghua University. More than 100 people, including experts, scholars and postgraduates from the field of planarization technology at home and abroad participated in the forum. Academician You Zheng, Assistant President of Tsinghua University and Dean of the School of Mechanical Engineering, Li Ming, Executive Deputy Director of the Department of Engineering and Materials Science of the National Natural Science Foundation of China, Xu Xiaotian, Executive Vice President and Secretary General of China Semiconductor Industry Association, and Academician Luo Jianbin, Director of the Department of Mechanical Engineering, Tsinghua University and Vice Chairman of International Tribology Society, attended the forum and delivered speeches. Shi Ying, Secretary General of the Materials Alliance attended the meeting and Professor Lu Xinchun, Chairman of Planarization Technology Alliance, presided over the meeting.