a Optoelectronics”) in Beijing Kempur Microelectronics Materials Co., Ltd. (hereinafter referred to as “Beijing Kempur”) was held at the Beijing Convention Center. Qiu Gang, Director of National Science and Technology Major Project Office, Director Ye Tianchun, Chief Engineer of National Science and Technology 02 Major Project, Xu Xiaotian, Executive Vice President of China Semiconductor Industry Association, and experts from National Science and Technology 02 Major Project consultation, experts from National Science and Technology 02 Major Project group, and experts in the field of national funds and national new materials, and nearly one hundred representatives from government, enterprise, universities, institutes and users such as Beijing Kempur, Nata Optoelectronics, SMIC, Wuhan Xinxin, etc. attended the conference. The conference was jointly organized by Beijing Kempur Microelectronics Materials Co., Ltd., Jiangsu Nata Optoelectronic Materials Co., Ltd. and the Integrated Circuit Materials & Components Industry Technology Innovative Alliance.
Photoresist is an important basic material required by the electronic information industry, and plays an important supporting role in industries such as integrated circuits, discrete devices, flat panel displays, and LEDs. In order to reverse the long-term dependence of China's high-grade photoresist on imports, the National Science and Technology 02 Major Project launched the “248nm photoresist development and industrialization” project in 2010. Beijing Kempur undertook the project and completed the development of 248nm photoresist basic products and construction of industrialization capacity, and established the experimental platform for photoresist application process development, the developed products have been accepted by SMIC and began to supply in small quantities. On this basis, Nata Optoelectronics invested 123 million yuan to solve the shortage of funds for the development of 248nm photoresist systemized products and the localization of key raw materials by Beijing Kempur, which greatly accelerated the marketization process of 248nm photoresist.
Director Qiu Gang pointed out in his speech that materials are the foundation of the integrated circuit industry. Photoresist, as a key component in integrated circuit materials, is one of the key contents of the 13th Five-Year Plan of National Science and Technology Major Project. It’s hoped that the enterprises, universities, institutes, users and capitals can be united together to deeply explore the integration of resources to achieve complementary advantages, and practically develop the implement plan of China's photoresist industry, and accelerate the related work.
During the seminar, Shi Ying, Secretary General of the Materials Alliance made a keynote speech entitled “Current Status and Development Prospects of China's Semiconductor Manufacturing Materials Industry”. While reviewing the development history and the major progress and future development goals of China's semiconductor manufacturing materials industry, she analyzed the competitive situation of photoresist at home and abroad, the outstanding problems existing in China's photoresist industry, and hoped to seize the major opportunities such as the opening period of the 13th Five-Year Plan and Made in China 2025 to gather talents from all sides, raise funds from various parties, and open up cooperation to solve the difficulties and realize industrial development while Nata Optoelectronics investing Beijing Kempur. Chen Xin, Chairman of the Board of Directors of Beijing Kempur reported the progress of the company in the development and marketing of i-line photoresist and 248nm photoresist technology, as well as the development roadmap of high-grade photoresist industry in the future. Xu Congying, Technical Director of Nata Optoelectronics reported the initial implementation plan of 193nm photoresist in the conference. Sun Xiangzhen, Chairman of Nata Optoelectronics and Dr. Feng Changzheng, representative of Beijing Kempur Investment, shared their experiences in developing the high-end electronic materials industry and said that they will continue to increase investment in the field of photoresist, so as to achieve sustainable development of the company while achieving the national strategic goals. Director of the SMIC International Process Enhancement Department, Huang Zilun, Director of Process Reinforcement Department of SMIC said that SMIC is very supportive of the development of localized photoresist companies. The company will also strengthen cooperation with Kempur to provide more information and help in application requirements, avoiding or reducing unnecessary efforts in developing photoresist product. Li Ping, Deputy General Manager of Wuhan Xinxin reported the demand for photoresist for the development of 3D NAND business. He said that it is a strategy of the company to support the development of localized materials industry to grow together with domestic materials factories. It’s hoped that the photoresist enterprises can start cooperation at the beginning of the process development of the manufacturing plant and put it into use when the manufacturing plant starts mass production. Hong Xiaoyin, Professor of Tsinghua University, an old generation expert in China's photoresist industry, stressed that photoresist is a strategic demand of the country. It cannot simply pursue economic benefits. However, it must carry out systematic top-level design from basic research, personnel training, and industrial development. The participating representatives also carry out hot discussions on establishing an open and shared photoresist application process development platform, encouraging manufacturers to use domestic materials, and solving the problems of localization of key raw materials for photoresists.
Representatives from Shanghai Anji Microelectronics, Zhongguancun Financial Leasing Company, Chaoyang Branch of China Merchants Bank, Jianguo Branch of Bank of Beijing, Fudan University, Institute of Chemistry, Chinese Academy of Sciences, Beijing University of Chemical Technology, Beijing Normal University, Shenzhen Institute of Advanced Technology, Beijing Yandong, Jilin Sino-microelectronics, Shenzhen Si Semiconductor, Silan IC, CSMC Technologies Corporation, etc. were present at the seminar.
Chief Engineer Ye Tianchun pointed out and summarized in his speech that the deployment of innovation chain around the industrial chain is the principle of implementation and layout of National Science and Technology 02 Major Project. It is hoped to create an industrial technology innovation atmosphere, promote technology development and product quality improvement, and accelerate the development of supply chain through the implementation of 02 Major Project. Beijing Kempur has made certain progress in the technical development of the 248nm photoresist industry, which is worthy of congratulations, but there is still a gap from the flagship enterprises that are specialized in cultivating competitiveness. It is a good thing for Nata Optoelectronics to invest in Beijing Kempur. It is hoped that the company will be able to communicate and coordinate with all parties in the industry to study and formulate the implementation plan for the future development of high-grade photoresist, and clarify the specific measures in the field of personnel training, discipline construction, basic research for application and industrial development, so as to achieve greater breakthroughs during the 13th Five-Year Plan period.
After the seminar, a signing ceremony for the cooperation between Nata Optoelectronics and Beijing Kempur was held. The investment of Nata Optoelectronics Co., Ltd. into Beijing Kempur is a representative case of the Material Alliance that adhered to the concept of collaborative innovation and cooperative development, and guided and promoted the cooperation among the enterprises in the Alliance and industrial integration development for a long time. Through this cooperation, it will effectively integrate the technology and market resources of Beijing Kempur and Nata Optoelectronics in the field of integrated circuit materials, and integrate talents in the fields of technology, management and market on a larger scale and at a higher level by taking advantage of the financing platform and standardized company operation experience of Nata Optoelectronics, so as to improve the operation level of Beijing Kempur, and promote the development of China's high-end photoresist industry technology to higher technology nodes.