On April 27, 2017, the “Seminar on High-Purity Sulfuric Acid Recovery and Reuse in Semiconductor Plants” sponsored by the Integrated Circuit Materials & Components Industry Technology Innovative Alliance (hereinafter referred to as the “Alliance”) and undertook by Haike Group and Shanghai Syntano Venture Capital Co., Ltd. was successfully held in Shanghai. More than 30 people including He Yi, Senior Engineer of the State Environmental Protection Administration, Song Yang, Deputy Director of the Hi-tech Office, Shanghai Municipal Science and Technology Commission, Zhu Huan and Jiang Ling from Social Development Division, Chen Xiaoliang, Shanghai Environmental Protection Bureau, Qu Ruijing, expert of China Association Of Circular Economy, Fan Dongmei, Deputy Secretary General, Li Chong, Secretary General of China Sulphuric Acid Industry Association, Shi Ying, Secretary General of the Alliance, Yin Qingyuan, Vice President of Haike Group, Zhang Sheng’an, General Manager of Syntano Company, and representatives from SMIC, Shanghai Huali Microelectronics Co., Ltd., Shanghai Huahong Grace Semiconductor Manufacturing Co., Ltd., Jiangyin Jianghua Microelectronics Materials Co., Ltd., Polyfluoropoly Chemical Co., Ltd., and Shijiazhuang Chengzhi Yongsheng Electronic Technology Co., Ltd. attended the seminar. They conducted deep discussion on issues such as the green development road of recovery of sulfuric acid in the semiconductor industry and the implementation plan of demonstration project of Haike Group.
Ms. Shi Ying, Secretary General of the Alliance, presided over the meeting and pointed out that the recycling of semiconductor chemicals has significant economic and social benefits for protecting the environment, conserving resources, promoting green manufacturing and sustainable development. However, at present, the primary level reuse of semiconductor manufacturing chemicals still has many problems to be coordinated and solved, such as process technology, coordination of Fab factory management, supervision of environmental protection department and operation mode, and it also lacks guidance of industry standards, which needs active participation of regulatory authorities in relevant enterprises and industries. The primary level reuse technology proposed by Haike Group and the establishment of demonstration projects will play a good demonstration role.
Shi Ying, Secretary-General of the Technology Innovation Strategic Alliance of the Integrated Circuit Materials and Components Industry, presided over the opening
Representatives of semiconductor manufacturing companies such as SMIC, Huali Microelectronics, and Huahong Grace introduced the current situation of waste acid treatment and the desire of primary recycling from the user's point of view, pointing out that with the continuous improvement of China's integrated circuit manufacturing level and the continuous expansion of Fab factory, the demand for high-purity sulfuric acid in the production process has increased exponentially, consequently, the rapid increase in output of waste acid and the significant increase in the cost of disposal of hazardous waste chemicals have become a problem for every wafer processing plant. Jianghua Microelectronics Materials Co., Ltd. and Chengzhi Yongsheng Electronic Technology Co., Ltd. shared their experiences in the recycling and reuse of related chemicals. The representatives conducted hot discussion on the status of waste acid treatment, the problems that need to be solved and the experience that can be borrowed from the industry.
He Yi, Senior Engineer of the Ministry of Environmental Protection, and Qu Ruijing, expert of the China Association of Circular Economy, respectively interpreted the relevant environmental protection policies from the two aspects of prevention and control of hazardous wastes in the “13th Five-Year Plan” and the current situation of waste sulfuric acid environmental management in China. Song Yang, Director of Shanghai Municipal Science and Technology Commission, and Chen Xiaoliang, Shanghai Environmental Protection Bureau, introduced the current regulatory status of the hazardous waste recycling industry in Shanghai by the environmental protection department of Shanghai, and pointed out that the recycling and reuse of hazardous chemicals in semiconductors is of great significance. Relevant enterprises are welcomed to participate in to actively promote the development of high technology in this field.
Yin Qingyuan, Vice President of Haike Group, conducted face-to-face exchanges with the participating representatives on the site selection, profit model, establishment of central analysis room, government qualification approval and user recognition, and said that Haike Group, as a chemical company adhering to the concept of sustainable development, cannot sacrifice the comprehensive cost of the environment and the society in the process of development, hoping to improve the pilot project plan and promote implementation as soon as possible.